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온도센서를 사용하지 않는 MEMS 마이크로히터 온도제어시스템
배병훈,염정훈,B. R. Flachsbart,M. A. Shannon 대한전기학회 2006 전기학회논문지C Vol.55 No.11C
- In this paper, we present a temperature-controlled system for MEMS electrical resistance heaters without a temperature sensor. To rapidly control the heater temperature, the microheater system developed consists of a power supply, power amplifier, digital Proportional-Integral-Differential (PID) controller, and a quarter bridge circuit with the microheater and three resistors are nominally balanced. The microheaters are calibrated inside a convection oven to obtain the temperature coefficient with a linear or quadratic fit. A voltage amplifier applies the supply voltage proportional to the control signal from the PID controller. Small changes in heater resistance generate a finite voltage across the quarter bridge circuit, which is fed back to the PID controller to compare with the set-point and to generate the control signal. Two MEMS microheaters are used for evaluating the developed control system - a NiCr serpentine microheater for a preconcentrator and a Nickel microheater for Polymerase Chain Reaction (PCR) chip.