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민복기(Bokki Min),김재구(Jaegu Kim),조성학(Sunghak Cho),최두선(Doosun Choi),황경현(Kyunghyun Whang) 한국레이저가공학회 2008 한국레이저가공학회 학술대회 논문집 Vol.2008 No.-
This paper presents the method to fabricate a roll mold with microstructure using DPSS(diode pumped solid-states) UV laser. DPSS laser ablation makes it possible to micromachine by controlled energy density and pulse repetition rate of laser. But, In case of metal ablation, molten debris is caused by thermal damage. Hence, We suggest the process of the ablation of a photoresist(PR) coated on roll mold. And we design a roll coater for laminating the photoresist onto the curby surface of a copper roll mold. The microstructure on roll mold is fabricated by controlled laser pulse energy, pulse repetition rate, rotation speed and rotation number of roll. We compare and analyze the quality of microstructure by the wet etching process with the quality by the direct write process.
DPSS UV laser와 습식 식각을 이용한 금형강 미세 가공
민경익(Kyoungik Min),김재구(Jaegu Kim),조성학(Sunghak Cho),최두선(Doosun Choi),황경현(Kyunghyun Whang) 한국레이저가공학회 2009 한국레이저가공학회지 Vol.12 No.3
This paper describes the method for the fabrication of micro dot array on a plastic mold steel using DPSS (diode pumped solid-states) UV laser and wet etching process. We suggest the process of the ablation of a photoresist (PR) coated on plastic mold steel and wet etching process using solutions of various concentrations of FeCl3, HNO3 in water as etchants. This method makes it possible to fabricate metallic roller mold because the microstructures are directly fabricated on the metal surface. In the range of operating conditions studied, 17 μJ laser pulse energy and 50 ms laser exposure time, an etchant containing 40wt% FeCl3, 5wt% HNO3 and etch time for 45 s gave the 10 ㎛ of micro dot pattern on plastic mold steel.