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ZnO ALE를 위한 Si, sapphire기판의 ECR 플라즈마 전처리
임종민,신경철,이종무,Lim Jongmin,Shin Kyoungchul,Lee Chongmu 한국재료학회 2004 한국재료학회지 Vol.14 No.5
Recently ZnO epitaxial layers have been widely studied as a semiconductor material for optoelectronic devices. Sapphire and silicon are commonly selected as substrate materials for ZnO epitaxial growth. In this communication, we report the effect of the ECR plasma pretreatment of sapphire and silicon substrates on the nucleation in the ZnO ALE (atomic layer epitaxy). It was found that ECR plasma pretreatment reduces the incubation period of the ZnO nucleation. Oxygen ECR plasma enhances ZnO nucleation most effectively since it increases the hydroxyl group density at the substrate surface. The nucleation enhancing effect of the oxygen ECR plasma treatment is stronger on the sapphire substrate than on the silicon substrate since the saturation density of the hydroxyl group is lower at the sapphire surface than that at the silicon surface.
임종민(Jongmin Lim),이태웅(Taeung Lee),김태준(Taejoon Kimi) 한국자동차공학회 2018 한국자동차공학회 학술대회 및 전시회 Vol.2018 No.11
This paper shows a new point of view in learning process for shift quality of automatic transmission is proposed by machine learning(regression). The effective factors of shift quality were selected and analyzed and applied to the solenoid of the shift mode. In the paper, a numerical model was created about 35R clutch of Automatic transmission. As a result of the application of this method, to compensate the hydraulic characteristics deviation of each solenoids which is resulted from massive manufacturing, by using enhanced learning procedure for learning logic..