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혈청 단백 분획치의 참고치 조사(서울 의과학 연구소 서울 임상검사 센타)
유영식 ( Y S Yu ),이병욱 ( B O Lee ),송남석 ( N S Song ),성상철 ( S C Seong ),이경옥 ( K O Lee ),서덕규 ( D K Seo ),이규범 ( K B Lee ) 대한임상검사과학회 1991 대한임상검사과학회지(KJCLS) Vol.23 No.1
A study was performed to compare an agarose gel electrophoresis for the protein fraction with the other reported reference values. It was carried out to determine the reference values of adults in Seoul area, from Oct. 1st 1991 through Oct. 20th 1991. 143 male and 87 female venous blood sampl- es were collected from SCL personnel and collected analized by the agarose gel electrophoresis at the Seoul Clinical Laboratory of Seoul Medical Science Institute. The results are shown on Table 2 and 3. Our results show that albumin was 2. 4% lower and .,-globulin was 4. 5% higher compared with the Corning report in the U.S. A., whereas our results were virtually equal to previously reported results of rural population in Korea. The increase- d y-globulin albeit small, may indicate more prevalent chronic infection among Korea populati on.
DLC Structure Layer for Piezoelectric MEMS Switch
황현석,이경근,유영식,임윤식,송우창,Hwang, Hyun-Suk,Lee, Kyong-Gun,Yu, Young-Sik,Lim, Yun-Sik,Song, Woo-Chang Korea Society of Satellite Technology 2011 한국위성정보통신학회논문지 Vol.9 No.1
본 논문에서는 d33 모드로 구동하여 우수한 성능을 가지는 RF-MEMS 스위치의 구현을 위한 희생층과 구조층의 조합으로서 DLC와 포토레지스트를 제안하였다. 포토레지스트의 경화현상을 방지하기 위하여 DLC 구조층은 상온에서 RF-PECVD 방법을 이용하여 증착하였다. 그리고 PZT 압전층은 RF 마그네트론 스퍼터링 방법을 이용하여 상온에서 구조층 위에 증착하였으며, 희생층의 제거 후 결정화를 위하여 급속 열처리 (RTA) 장비를 이용하여 후 열처리하였다. PZT의 결정화 과정과 DLC의 기계적 성질의 변화를 다양한 온도조건에 따라 분석한 결과 DLC는 PZT의 결정화 온도까지 영률과 강도면에서 우수한 특성을 나타냄을 확인하였다. 또한 포토레지스트를 사용함으로서 공정을 단순화하고 낮은 비용으로 제작이 가능하였다. In this paper, a new set of structural and sacrificial material that is diamond like carbon (DLC)/photoresist for high performance piezoelectric RF-MEMS switches which are actuated in d33 mode is suggested. To avoid curing problem of photoresist sacrificial layer, DLC structure layer is deposited at room temperature by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. And lead zirconate titanate (PZT) piezoelectric layer is deposited on structure layer directly at room temperature by rf magnetron sputtering system and crystallized by rapid thermal annealing (RTA) equipment. Particular attention is paid to the annealing of PZT film in order to crystallize into perovskite and the variation of mechanical properties of DLC layer as a function of annealing temperature. The DLC layer shows good performance for structure layer in aspect to Young's modulus and hardness. The fabrication becomes much simpler and cheaper with use of a photoresist.
루테늄 전극위에 증착된 PZT 박막의 전기적 및 강유전 특성
황현석(Hyun Suk Hwang),유영식(Yougn Sik Yu),임윤식(Yun-Sik Lim),강현일(Hyun-il Kang) 대한전기학회 2014 전기학회논문지 P Vol.63 No.1
Pb(Zr0.52Ti0.48)O₃(PZT) thin films deposited on Ru/RuO₂ bottom electrode that grown for in-situ progress used rf magnetron sputtering method. We investigated the dependence of the crystalline and electrical properties in the way of capacitors PZT thin films. Our results show that all PZT films indicated polycrystalline perovskite structure with preferred orientation (110) and no pyrochlore phase is observed. The electric properties of the Ru improved with increasing Ru thin films thickness. A well-fabricated Ru/PZT/Ru (100 nm) /RuO₂ capacitor showed a leakage current density in the order of 2.03×10<SUP>-7</SUP> A/cm<SUP>2</SUP> as a 50 kV/cm, a remnant polarization (Pr) of 9.22 μC/cm², and a coercive field (-EC) of -32.22 kV/cm. The results show that Ru/Ru/RuO₂ bottom electrodes are expected to reduce the degradation ferroelectric fatigue and excellent ferroelectric properties.