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반도체 공정용 케미컬 탱크의 효율적인 노후 진단 방법 및 관리방안
안준민(Jun Min An),김신우(Shin Woo Kim),한재동(Jae Dong Han),공준진(Jun Jin Kong) 대한전자공학회 2023 대한전자공학회 학술대회 Vol.2023 No.11
Failure to perform proper maintenance on chemical tanks that store chemicals for semiconductor processes can cause serious problems such as container damage and drug leakage due to aging, which can increase the probability of accidents such as fires, explosions and environmental pollution and increase human and material damage. In order to prevent this risk in advance, it is necessary to diagnose the aging of the chemical tank and properly manage it. In this paper, the cost and time were reduced by proposing efficient selection criteria for chemical tanks subject to aging diagnosis so that only about 12% of tanks that were actually aging could be diagnosed, and by conducting aging diagnosis based on the proposed criteria, metal contamination caused by drug leakage and lining corrosion that were not previously found was found, and immediate use was prohibited and reinforced to prevent accidents such as environmental pollution.