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웨이퍼 엣지 환형 불량 개선을 위한 코팅 레시피 개선 연구
김진수(Jin-Soo Kim),김대욱(Dae-Wook Kim),공준진(Jun-Jin Kong) 대한전자공학회 2022 대한전자공학회 학술대회 Vol.2022 No.11
The purpose of this paper is to identify and solve the cause of wafer edge annular defects in the Photo H-SOH (Hybrid-Spin On Hardmask) process, which is a semiconductor manufacturing process. The components of SOH used in the HSOH process were investigated to do this, and the components of SOH that caused the defect and good SOH were significantly different. Since specific components of PR (Photo Resist) and SOH are determined according to the product to be produced, it is difficult to directly change the components, and thus the defect had to be solved by changing the process conditions. Therefore, in this paper, an improved coating recipe was proposed through an experiment for increasing the contact time between SOH and Thinner and an experiment for increasing the drying time after applying the SOH. The recipe obtained through this research could be applied not only to the photo H-SOH process but also to the photo lithography process with additional experiments, and it is expected that it will be of great help to improve quality by reducing edge annular defects.
반도체 공정용 케미컬 탱크의 효율적인 노후 진단 방법 및 관리방안
안준민(Jun Min An),김신우(Shin Woo Kim),한재동(Jae Dong Han),공준진(Jun Jin Kong) 대한전자공학회 2023 대한전자공학회 학술대회 Vol.2023 No.11
Failure to perform proper maintenance on chemical tanks that store chemicals for semiconductor processes can cause serious problems such as container damage and drug leakage due to aging, which can increase the probability of accidents such as fires, explosions and environmental pollution and increase human and material damage. In order to prevent this risk in advance, it is necessary to diagnose the aging of the chemical tank and properly manage it. In this paper, the cost and time were reduced by proposing efficient selection criteria for chemical tanks subject to aging diagnosis so that only about 12% of tanks that were actually aging could be diagnosed, and by conducting aging diagnosis based on the proposed criteria, metal contamination caused by drug leakage and lining corrosion that were not previously found was found, and immediate use was prohibited and reinforced to prevent accidents such as environmental pollution.