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비정질 실리콘 박막 태양전지 효율 향상을 위한 양극산화 알루미늄 템플레이트을 이용한 플라즈모닉 금 나노점 배열 최적화
배규영 ( Kyu Young Bae ),김경식 ( Kyoung Sik Kim ) 정보저장시스템학회 2013 정보저장시스템학회논문집 Vol.9 No.2
The fabrication method of plasmonic nanodots on silicon substrate has been developed to improve the efficiency of thin film solar cells. Nanoscale metallic nanodots arrays are fabricated by anodic aluminum oxide (AAO) template mask which can have different structural parameters by varying anodization conditions. In this paper, the structural parameters of gold nanodots, which can be controlled by the diverse structures of AAO template mask, are investigated to enhance the optical properties of a-Si thin film solar cells. It is found that optical properties of the thin film solar cells are improved by finding optimization values of the structural parameters of the gold nanodot array.