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노호철,노승훈,류영찬,이일환,정금섭,김영조 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.1
Inspection and measurement of surface quality is one of the most critical processes for manufacturing products such as semiconductor wafers, sapphire substrates, and display panels. The vibrations of the inspection and measurement devices are supposed to be the most dominant factors for severe measurement errors and longer measuring time. In this study, dynamic characteristics of an inspection and measurement device are analyzed through frequency response experiment and computer simulation to obtain parameters such as frequencies, magnitudes, mode shapes, and periods of vibrations. And then an active damper which consists of sensor, interface board, and actuator is designed based on the parameters to formulate the most effective reaction signal to suppress the vibrations which is generated by an interface board, and provided by an actuator. If the vibrations are measured by the sensor, the active damper immediately generates and provides the corresponding reaction signal to inspection and measurement device. The result shows that the active damper can suppress structural vibrations effectively and reduce measuring time of the device and enhance the productivity.
가공정도 향상을 위한 Pipe Cutting Machine의 설계 개선
길사근,노승훈,신호범,김영조,김동욱,노호철 한국반도체디스플레이기술학회 2018 반도체디스플레이기술학회지 Vol.17 No.3
The modern industry requires the precision machining as well as the high productivity. The machine tool structure should be evaluated in aspects such as durability, static stability, precision rate and the dynamic stability which is one of the most critical characteristics in determining the magnitude of vibrations. In this study, the dynamic properties of a pipe cutting machine were investigated to analyze the structural vibrations of the machine, and further to improve the structural stability and precision machining. Frequency response test and computer simulation have been utilized for the analysis and the design alterations. And the result shows that proposed design alterations can reduce the vibrations of the machine substantially.