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Ti-30Ta-xZr 합금의 표면에 TiN/Ti 다층막코팅효과
김영운(Y.U. Kim),정용훈(Y.H. Jeong),조주영(J.Y. Cho),최한철(H.C. Choe),방몽숙(M.S. Vang) 한국표면공학회 2009 한국표면공학회지 Vol.42 No.4
Effects of TiN/Ti multilayer coating on the Ti-30Ta-xZr alloy surface were studied by using various experiments. The Ti-30Ta containing Zr (5, 10 and 15 wt%) were melted 10 times to improve chemical homogeneity by using a vacuum furnace. And then samples were homogenized for 24 hrs at 1000oC. The specimens were prepared for TiN/Ti coating by cutting and polishing. The prepared specimens were coated with TiN/Ti multilayers by using DC magnetron sputtering method. The analyses of coated surface and coated layer were carried out by field emission scanning electron microscope(FE-SEM), EDX, and X-ray diffractometer(XRD). From the microstructure and XRD analysis of Ti-30Ta-xZr alloys, The equiaxed structure was changed to needle-like structure with increasing Zr content. And α-peak and elastic modulus increased as Zr content increased. The α and β? phase predominantly were found in the specimen containing high Zr content. According to the analysis of TiN/Ti coating layer, the surface defects and structures of Ti-30Ta-xZr were covered with TiN/Ti coating layer and surface roughness decreased.