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2단 튜브형 가열로 반응기에 의한 초미세 SiO<sub>2</sub> 입자의 제조 및 증착 연구
유수종,김교선,You, Soo-Jong,Kim, Kyo-Seon 강원대학교 산업기술연구소 1997 産業技術硏究 Vol.17 No.-
The effects of preheating the gas stream on deposition characteristics of ultrafine $SiO_2$ particles were investigated theoretically. The model equations such as mass and energy balance equations and aerosol dynamic equations were solved to predict the particle growth and deposition. The gas temperatures, $SiCl_4$ concentrations, $SiO_2$ particle volumes, $SiO_2$ particle sizes and deposition efficiencies of $SiO_2$ particles were calculated for various preheating temperatures. As the preheater setting temperature increases, the $SiO_2$ particle size distribution becomes more uniform, because the effect of $SiCl_4$ diffusion decreases.
증착 구간에서의 온도 제어에 따른 SiO<sub>2</sub> 초미립자의 증착 특성 고찰
유수종,김교선,You, Soo-Jong,Kim, Kyo-Seon 강원대학교 산업기술연구소 1996 産業技術硏究 Vol.16 No.-
The deposition characteristics of ultrafine $SiO_2$ particles were investigated in a tube furnace reactor theoretically and experimentally controlling tube wall temperature in deposition zone. The model equations such as mass and energy balance equations and aerosol dynamic equations inside reactor and deposition tube were solved to predict the particle growth and deposition. The particle size and deposition efficiencies of $SiO_2$ particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate inlet $SiCl_4$ concentration and were compared with the experimental results.
2단 튜브형 가열로 반응기에 의한 초미세 SiO₂입자의 제조 및 증착 연구
유수종,김교선 江原大學校 産業技術硏究所 1997 産業技術硏究 Vol.17 No.-
The effects of preheating the gas stream on deposition characteristics of ultrafine SiO₂particles were investigated theoretically. The model equation such as mass and energy balance equations and aerosol dynamic equations were solved to predict the particle growth and deposition. The gas temperatures, SiCl₄concentrations. SiO₂particle volumes, SiO₂particle sizes and deposition efficiencies of SiO₂ particles were calculated for various preheating temperatures. As the preheater setting temperature increases, the SiO₂particle size distribution becomes more uniform, because the effect of SiO₄diffusion decreases.
증착 구간에서의 온도 제어에 따른 SiO₂초미립자의 증착 특성 고찰
유수종,김교선 江原大學校 産業技術硏究所 1996 産業技術硏究 Vol.16 No.-
The deposition characteristics of ultrafine SiO? particles were investigated in a tube furnace reactor theoretically and experimentally controllin tube wall temperature in deposition zone. The model equastions such as mass and energy balance equations and aerosol dynamic equations inside reactor and deposition tube were solved to predict the particle growth and deposition. The particle size and deposition efficiencies of SiO? particles were calculated, changing the process conditions such as tube furmace setting temperature, total gas flow rate inlet SiCl? concentration and were compared with the experimental results.