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권오붕(O. B. Kwon),김명관(M. K. Kim),이연수(Y. S. Lee) 한국동력기계공학회 2006 한국동력기계공학회 학술대회 논문집 Vol.- No.-
In this study, flow characteristics at the regulators, which is very important for clean gas supply systems for semiconductors and LCD industries, are investigated. Numerical simulations are carried out to visualize flows at regulators for several flow rates and to investigate pressure losses at the some parts in a regulator. Velocity field at the regulator along with the detailed velocity field near the spring and near the valve is shown. Pressure distributions for the case of fully opened valve opening and partially opened opening are shown. Pressure drops a lot across the valve seat. Pressure drop increases as mass flow rate increases. Especially for small opening, pressure drop increases rapidly as mass flow rate become large.