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2단 Gifford-McMahon 극저온냉동기의 특성실험
박성제,고득용,유창종,김의준,최헌오,Park, S.J.,Koh, D.Y.,Yoo, C.J.,Kim, E.J.,Choi, H.O. 대한설비공학회 1993 설비공학 논문집 Vol.5 No.3
Experimental results of two stage Gifford-McMahon cryorefrigerator are described. In-prototype experiments, drive mechanism is Scotch Yoke type driven by stepping motor, copper meshes and lead balls are used for regenerator's materials in the first stage and the second stage, respectively. To find optimal conditions of the cryopump, no load temperature and refrigeration capacity according to the variation of cycle frequency and operating pressure are measured, and the cool down and load characteristics at particular cycle frequencies are presented. In general, as the cycle frequency is lowered, no load temperature is dropped but refrigeration capacity is diminished. As the representative result, in a case that the cycle frequency is 70rpm and steady state pressure is 14 atm, no load temperature of second stage is lowered to 10.5K in 55 minuters, and in this situation the refrigeration capacity of the first stage is 42W at 80K, that of the second stage is 11 W at 20K.
강상백,신진현,차덕준,고득용,정완섭,임종연,Kang, S.B.,Shin, J.H.,Cha, D.J.,Koh, D.Y.,Cheung, W.S.,Lim, J.Y. 한국진공학회 2010 Applied Science and Convergence Technology Vol.19 No.4
터보분자펌프(TMP)의 특성평가는 ISO, PNEUROP, DIN, JIS, AVS 등 세계 여러 나라의 표준제정기구에서 제정한 국제규격에 그 근거를 두고 있다. 한국표준과학연구원에서는 이러한 국제규격에 기반을 둔 터보분자펌프의 특성평가시스템을 자체 설계/제작하여 그 신뢰성을 확인하기 위해 개발품 및 상용품의 평가에 주력하고 있다. 터보분자펌프의 배기속도 측정방법으로서 기체흐름 영역에 따른 throughput method와 orifice method를 적용하고 있으나 측정게이지, 유량계 및 orifice conductance의 불확도 등 실질적으로 정확한 배기속도를 제시하기 위한 조건들의 제약 때문에 많은 측정오차를 포함하고 있다고 볼 수 있다. 이러한 배기속도의 측정오차를 줄이기 위한 하나의 고찰로서 본 논문에서는 $10^{-1}$ Pa-L/s 영역까지의 유량 주입범위를 가지는 기 구축된 정적법을 이용한 유량주입에 기반을 둔 throughput method를 이용하여 1000 L/s TMP의 측정 능력을 검증하고자 한다. 또한 분자류 영역인 orifice method를 사용할 경우 고진공영역, 미세유량 주입영역으로 진입할수록 커질 수밖에 없는 배기속도 측정 불확도를 최소화시키기 위해 검증된 유량을 이용한 conductance 값을 제시하여, 기 언급한 두 가지 배기 속도 측정 방법의 연속성을 유지하기 위한 실험적인 방법론을 제기하고자 한다. Methods of the characteristics evaluation of turbo-molecular pumps (TMP) are well-defined in the international measurement standards such as ISO, PNEUROP, DIN, JIS, and AVS. The Vacuum Center in the Korea Research Institute of Standards and Science (KRISS) has recently designed, constructed, and established the integrated characteristics evaluation system of TMPs based on the international documents by continuously pursuing and acquiring the reliable international credibility through measurement perfection. The measurement of TMP pumping speed is normally performed with the throughput and orifice methods dependent on the mass flow regions. However, in the UHV range of the molecular flow region, the high uncertainties of the gauges, mass flow rates, and conductance are too critical to precisely accumulate reliable data. In order to solve the uncertainty problems of pumping speeds in the UHV range, we introduced a SRG with 1% accuracy and a constant volume flow meter (CVFM) to measure the finite mass flow rates down to $10^{-1}$ Pa-L/s with 3% uncertainty for the throughput method. In this way we have performed the measurement of pumping speed down to $10^{-4}$ Pa with an uncertainty of less than 6% for a 1000 L/s TMP. In this article we suggest that the CVFM has an ability to measure the conductance of the orifice experimentally with flowing the known mass through the orifice chambers, so that we may overcome the discontinuity problem encountering during introducing two measurement methods in one pumping speed evaluation sequence.