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김진석(J.S. Kim),김한수(H.S. Kim),이동윤(D.Y. Lee),이석우(S.W. Lee),강은구(E.G. Kang) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
In recently, trends of the miniaturization of micro parts machining pattern by laser machining methods have been emerged. However, the conventional laser processing methods have limitations on the resolution. So, e-beam process has been considered as alternatives. Especially, e-beam lithography has been taken accounted of tools for micro and nano pattern. But e-beam lithography equipment have some disadvantages such as lower productivity and smaller processing area etc. than other micro parts machining tools. Therefore we have carried out the development of micro column electron beam lithography equipment for achieving the more higher productivity, lager processing area, and also higher resolution. And then we tried to develop e-beam lithography system with micro column type and using wafer lens for multi column e-beam lithography system and modular e-beam lithography unit. In this paper, we developed the electro static lens system, composed of accelerator lens, condenser lens, objective lens, beam blanker, stigmator and deflector.
남성호(S.-H. Nam),홍원표(W.-P. Hong),강은구(E.-G. Kang),이석우(S.-W. Lee),최헌종(H.-Z. Choi) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
Small and medium-sized enterprises should collaborate with themselves to reduce the cost and delivery, and to increase the productivity. Collaborative IT infrastructure like as e-Manufacturing collaborative hub system became more essential parts in their business among the enterprises. Furthermore, the enterprises using the hub system also require their own services corresponding to each enterprise-oriented business role. In this study, the component-based collaborative infrastructure is presented to take into account the support of collaboration services as well as the integration of business process. It has been also investigated that this infrastructure is advantageous to configure the enterprise-customized collaboration systems and to immediately support the system for the enterprises.