http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
TiN 박막 제조를 위한 PECVD 공정의 모사화 연구
안경환,설용건,김선효 ( Kyung Han Ahn,Yong Gun Shul,Seon Hyo Kim ) 한국화학공학회 1993 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.31 No.4
Deposition rates for TiN films starting from the mixture of TiCl₄/N₂/H₂/Ar in PECVD(Plasma Enhanced Chemical Vapor Deposition) reactor were simulated with 1-dimensional radial dispersion model and these results were compared with the experimental results. Plasma dissociative reaction parameters were expressive of a function of R.F. power only, and TiN deposition rates on Si wafer were estimated by assuming a Langmuir-Hinshelwood-Hougen-Watson(L.H.H.W.) mechanism. In considering the reaction mechanisms, surface reactions starting from TiCl₃ or TiCl₂ were evaluated, respectively. Calculated TiN deposition rates agreed with the experimental results for the changes of temperature, and low range R.F. power, but some discrepancy was found for the changes of H₂/N₂ ratio and high range R.F. power.
RF Magnetron Sputtering 법을 이용한 압전성 ZnO 박막의 제조 및 그 표면분석
임상우,설용건,최지원,이전국,정형진 ( Sang Woo Lim,Yong Gun Shul,Jei Woon Choi,Jeon Kuk Lee,Heyong Jin Jung ) 한국화학공학회 1995 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.33 No.2
Zinc oxide thin films have been prepared on Si(100), Al/Si and SiO₂/Al/Si substrates by radio-frequency magnetron sputtering method under various deposition conditions. We have investigated the growth rate, crystal structure, morphology, chemical state and composition of the zinc oxide thin films. First of all, we investigated these properties at various sputtering pressures, O₂/Ar gas ratios and with different substrates. The growth rate strongly depends on the sputtering pressure and Oz/Ar gas ratio, and also depends a little on the kinds of substrates. C-axis orientations were obtained under all the deposition conditions for sputtering pressures above 5×10^(-3)Torr. Contrary to our expectations, the stoichiometry of the zinc oxide films does not depend on the O₂/Ar gas ratio, but depends strongly on the sputtering pressure. Thus, the oxygen mole fraction in the chamber affects the growth rate and crystallinity, but not the stoichiometry of the zinc oxide films. On the other hand, the sputtering pressure strongly affects the stoichiometry as well as the growth rate and crystallinity. Finally, the growth rate, crystallinity and stoichiometry of the zinc oxide thin films changed slightly with the different substrates. Under a substrate temperature of 250℃ and RF power of 200W, we could obtain the stoichiometric zinc oxide films at sputtering pressure of 5×10^(-2)Torr for all of the substrates.
졸 - 겔 공정에 의한 TiO2 박막 제조시 유기첨가제의 영향
문정호,설용건,최승철 ( Jeong Ho Mun,Yong Gun Shul,Seung Chul Choi ) 한국공업화학회 1995 공업화학 Vol.6 No.2
졸-겔 공정으로 TiO₂ 박막 제조시 유기 첨가제의 영향과 여러 기판 위에 형성된 박막의 결정성을 살펴 보았다. 대기중에서 헥실렌 글리콜(HG) 첨가는 에탄올 중에서 첨가제를 사용하지 않은 경우보다 더 안정한 TiO₂ 졸을 형성하였으며, hydroxypropy cellulose(HPC)는 에탄올 중의 TiO₂ 졸의 점도를 높여 코팅 가능한 점도 영역을 약 20cP까지 확장하였다. 또한 첨가제는 무정형상인 TiO₂겔의 결정화 온도를 높이는 역할을 하였다. 1회 dip 코팅으로 얻어진 막의 두께는 HG 첨가시에 약 200∼250Å, HPC 첨가시는 300Å 정도였고, 코팅 횟수를 반복하였을 때 막의 두께는 선형적으로 증가하였다. 제조한 박막은 대기중에서 500℃로 열처리한 경우 anatase(TiO₂)상을, 열처리 온도가 600℃일 때 rutile(TiO₂) 결정이 서서히 나타나기 시작하였다. 또한 TiO₂ 박막 특성에 대한 기판의 영향에 대해서도 살펴 보았다. In the preparation of TiO₂ thin film by sol-gel process, the effect of organic additives and the crystallinity of thin film formed on various substrates were investigated. Under the air atmosphere, the addition of hyxylene glycol(HG) forms more stable TiO₂ sol in ethanol than that made without HG. HPC(hydroxypropyl cellulose) increases the viscosity of TiO₂ sol in ethanol, which expands coatable viscosity range up to 20cP. In addition the additives increase the crystallization temperature of amorphous TiO₂ gel under the air atmosphere. The film thickness per one dipping in a TiO₂ sol was 200∼250Å with HG addition and 300Å with HPC addition, respectively. The thickness of TiO₂ thin film increases linearly by increasing the number of dipping. The anatase phase of TiO₂ thin film was observed after 500℃ calcination in air atmosphere, and the ruble phase began to appear after 600℃ heat treatment. The effect of substrate materials on the characteristic of TiO₂ thin film was also discussed.
분체공학 유동층 재료 ( 무기 , 유기 , 고분자 ) / 졸 - 겔 가압코팅법을 이용한 TiO2 복합막의 제조 및 기체 투과특성에 관한 연구
전경용(Kyoung Yong Chun),김정훈(Jeong Hun Kim),한준영(Jun Young Han),설용건(Yong Gun Shul),조영일(Young Il Cho) 한국화학공학회 2000 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.38 No.4
TiO₂sol was made from titanium alkoxide modified by acetyl acetone. After that, TiO₂composite membrane was prepared using the pressurized coating method. As acetyl acetone obstructed condensation reaction, the particle size of the sol was 5-10 ㎚. The range of the particle diameter was under 10 ㎚ in case of H₂O/Ti^(4+)≥2. Also, long aging time couldn`t affect particle growth. The top layer of separation membranes treated at 350 ℃ didn`t crack and the pore diameter was 2-3 ㎚. For the membranes, which was prepared by pressurized coating method for 4 times at 2 bar, the range of hydrogen and nitrogen permeance of composite membranes showed 8.5-99.6×10^(-7) and 18.2-32.7×10^(-7) ㏖/(㎡·s·Pa)respectively. And the ideal separation factor from the ratio of the H₂and N₂permeance was 3.76, which was in accordance with the value of Knudsen diffusion, 3.74.
이승길,이전희,설용건,현상훈 ( Seung Kil Lee,Jun Hee Lee,Yong Gun Shul,Sang Hoon Hyun ) 한국화학공학회 1996 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.34 No.5
In this experiment, spherical γ-LiAlO₂ powder which is used in molten carbonate fuel cells as a stable matrix material for the molten carbonate electrolyte was synthesized in the size of 0.1-2㎛ by spray pyrolysis method. Spray pyrolyzed powder started to form γ-LiAlO₂ phase at 600℃ and the phase transformation of γ-LiAlO₂ was completed at 800℃. Surface area of this samples was higher than that of commercialized samples. As jet pressure of the air increased from 0.2 atm to 0.5 atm, droplet size of the starting material decreased from 18 ㎛ to 13.4㎛. Decrease in concentration of starting materials(0.77-0.01 ㏖/ℓ) caused linear decrease in the mean particle size and size distribution of particles became narrowed.