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Jurim Jeon,김양진,Naohiko Sugita 대한기계학회 2023 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.37 No.9
Phase-calculation formula, involving a window and Fourier transform term, have been used for decades to profile the shape of sample surfaces. Windows can be designed using the phase-calculation polynomial theory to eliminate various types of phase errors. Here, we discuss the phase errors calculated by the phase-calculation formulas, comprising the windows and Fourier transform terms, by considering not only the linear error of the phase modulation but also the combined error between the higher harmonics and linear error of the phase modulation. The surface topography of a 4-inch wafer was also profiled using phase-calculation formulas for the various types of windows and a Fizeau-type interferometer. We also discuss the repeatability of the phase errors calculated using phase-calculation formulas.
Fe3O4/Laser-Induced Graphene as an Adsorbent for Microplastics Emitted from Household Wastewater
Sung-Yeob Jeong,Naohiko Sugita,Bo Sung Shin 한국정밀공학회 2023 International Journal of Precision Engineering and Vol.10 No.3
Removal of microplastics (MPs), which pose a severe threat to humanity and ecosystems, is essential. Although extensive efforts have been made to efficiently remove MPs, it still remains a difficult task. We fabricated Fe3O4/laser-induced graphene, by simply irradiating a laser on the surface of a polymer prepared by homogeneously mixing iron oxide, lignin powder, and polydimethylsiloxane, to efficiently remove household-derived MPs. Subsequently, Fe3O4-laser-induced graphene particles (Fe3O4-LIGPs) were prepared through scrapping and heat treatment. The Fe3O4-LIGPs efficiently adsorbed three types of MPs (melamine—particle size: 2 and 10 μm, polystyrene—particle size: 10 μm, polyamide—particle size: 50 μm) within 300 min and could be easily separated from the solution by using magnetic force. The adsorption of the MPs on the Fe3O4-LIGPs followed the pseudo-first and second-order kinetics and the Freundlich isotherm model. The maximum adsorption capacities of the Fe3O4-LIGPs for the different types of MPs were 1400 (polyamide, 50 μm), 1250 (polystyrene, 10 μm), 1050 (melamine—10 μm), and 775 (melamine—2 μm) mg∙g−1. The Fe3O4-LIGPs were reused seven times for each MP, after heat treatment, and their performance was evaluated.
Kim, Yangjin,Hibino, Kenichi,Kizaki, Toru,Sugita, Naohiko,Mitsuishi, Mamoru Elsevier 2017 Precision engineering Vol.48 No.-
<P><B>Abstract</B></P> <P>The absolute optical thickness and surface shape of optical devices are considered as the fundamental characteristics when designing optical equipment. The thickness and surface shape should be measured simultaneously to reduce cost. In this research, the absolute optical thickness and surface shape of a 6–mm-thick fused silica transparent plate of diameter 100mm was measured simultaneously by a three-surface Fizeau interferometer. A measurement method combining the wavelength tuning Fourier and phase shifting technique was proposed. The absolute optical thickness that corresponds to the group refractive index was determined by wavelength tuning Fourier analysis. At the beginning and end of the wavelength tuning, the fractional phases of the interference fringes were measured by the phase shifting technique and optical thickness deviations with respect to the ordinary refractive index and surface shape were determined. These two kinds of optical thicknesses were synthesized using the Sellmeier equation for the refractive index of fused silica glass, and the least square fitting method was used to determine the final absolute optical thickness distribution. The experimental results indicate that the all the measurement uncertainties for the absolute optical thickness and surface shape were approximately 3nm and 35nm, respectively.</P> <P><B>Highlights</B></P> <P> <UL> <LI> The absolute optical thickness and surface shape of a transparent plate were measured simultaneously using wavelength tuning. </LI> <LI> Two kinds of signal from interferogram were separated in the frequency domain using 4<I>N</I> − 3 phase shifting algorithm. </LI> <LI> 4<I>N</I> − 3 algorithm was used for compensating the phase shift errors and coupling errors. </LI> <LI> Two kinds of optical thicknesses were synthesized using Sellmeier equation and least square fitting. </LI> </UL> </P>
Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer
Sungtae Kim,Jurim Jeon,Yangjin Kim,Naohiko Sugita,Mamoru Mitsuishi 한국정밀공학회 2023 International Journal of Precision Engineering and Vol.10 No.2
Silicon wafers and transparent glass plates are major components in the semiconductor industry. In semiconductor devices, the surface shape and optical thickness of the wafers and glass plates are the key parameters for the optimal performance of the devices. Phase-shifting interferometry has been widely used to achieve precision measurements of these parameters. The phase-shifting algorithm significantly affects the interferometric measurement results with phase-shifting interferometry. In this review, we introduce the design and assessment of phase-shifting algorithms in the Fizeau interferometer. Section 2 categorized the phase-shifting algorithms designed by several methods in terms of their error compensation ability. Then, the optical setup of the Fizeau interferometer used for surface and thickness measurement is explained in Sect. 3. In addition, Sect. 4 explained the principle of phase extraction using phase-shifting interferometry and discussed its error sources. Moreover, design methods for the phase-shifting algorithm to eliminate error sources are introduced in Sect. 5. Finally, the error compensation abilities of designed algorithms are estimated by several methods in Sect. 6.
Design of a CFRP-elastomer composite with high stiffness and damping capability
Kizaki, Toru,Fujii, Tatsuya,Iwama, Masatoshi,Shiraishi, Masaru,Sugita, Naohiko,Ahn, Sung-Hoon Elsevier 2018 CIRP annals ... manufacturing technology Vol.67 No.1
<P><B>Abstract</B></P> <P>Machine tool made of CFRP has been emerging. Damping capability of the CFRP structure is not fully sufficient for the machine tool. Hence, the viscoelastic damping material has been inserted to improve the damping capability. We developed the optimizing method of the damping material distribution to maximize the damping capability while simultaneously fulfilling requirements regarding the static stiffness and the first resonant frequency of the entire structure. The distribution of the damping material was optimized by the method. The results showed improvement of the damping capability by 23% that was proved through a series of experiments.</P>
Preliminary Study of Needle Tracking in a Microsurgical Robotic System for Automated Operations
Yusuke Kurose,Young Min Baek,Yuya Kamei,Shinichi Tanaka,Kanako Harada,Shigeo Sora,Akio Morita,Naohiko Sugita,Mamoru Mitsuishi 제어로봇시스템학회 2013 제어로봇시스템학회 국제학술대회 논문집 Vol.2013 No.10
Surgical needle tracking is an important element of high-level automated operations conducted by surgical robotic systems. However, conventional needle tracking algorithms lack robust performancewith different needle postures and are not applicable to the small needles used during microsurgery. This paper discusses a robust, efficient needle tracking algorithm, which is capable of estimating all of the positions and of the postures of a microsurgical needle. In the preoperative preparation stage, contour models of the microsurgical needle are generated using a 3-D CAD model and saved in a database. During the operation, the system extracts the contours of the microsurgical needle from the microscopic image using the edge and the color information. The system then calculates the likelihood of the contour models in the database bymatching the contours extracted fromthemicroscopic image. The experimental results indicated that our proposed method has high accuracy when tracking a microsurgical needle, and that it performed robustly with different needle postures.