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정전기력 방식의 Drop-on Demand 토출을 위한 MEMS 잉크젯헤드 제작
孫尙郁(S. U. Son),金永珉(Y. M. Kim),崔在鎔(J. Y. Choi),李錫漢(S. H. Lee),高漢瑞(H. S. Ko),金容載(Y. J. Kim),邊渡泳(D. Y. Byun) 대한전기학회 2007 전기학회논문지 Vol.56 No.8
This paper presents a novel electrostatic drop-an-demand ejector with a conductive pole inside nozzle. The MEMS fabricated pole-type nozzle shows a significant improvement in the performance and reliability of forming meniscus and generating a micro dripping mode of droplet out of the meniscus. It is verified experimentally that the use of the pole-type nozzle. The liquid is used D2O+SDS+SWNT (5 %wt). The gap between upper electrode and nozzle is about 600 ㎛. Electrostatic drop-on-demand ejection is observed when a DC voltage of 1.5 ㎸ is applied between the control electrode and ground electrode. Droplet diameter is 100 ㎛.