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A Quantitative Performance Analysis of PYRAMID
Cook, Brian D.,Lee, Soo Young 대한전자공학회 1993 ICVC : International Conference on VLSI and CAD Vol.3 No.1
PYRAMID is a hierarchical, rule-based scheme for proximity effect correction in e-beam lithography. Experimental results have shown PYRAMID to be successful in correcting circuit patterns with a minimum feature size of 0.l ㎛ exposed in 200 nm PMMA on silicon. Previous papers have focussed on the implementation and experimental verification of our scheme and have not analyzed its performance quantitatively. This paper presents a performance analysis of the overall correction scheme employed in PYRAMID. Two important performance measures are discussed: controllability and pixel error. Controllability is a measure of how accurately we can control the post development location of a rectangle's edgy by changing the dimensions of the exposed rectangle. Pixel error is obtained by simulating the exposure of a corrected circuit pattern and comparing this result with the desired pattern. Using this technique we are able to determine average, pixel error as welt as boundary contrast.
Loh Tze Ping,Cooke Brian R,Tran Thi Chi Mai,Markus Corey,Zakaria Rosita,Ho Chung Shun,Theodorsson Elvar,Greaves Ronda F 대한진단검사의학회 2024 Annals of Laboratory Medicine Vol.44 No.2
Reporting a measurement procedure and its analytical performance following method evaluation in a peer-reviewed journal is an important means for clinical laboratory practi- tioners to share their findings. It also represents an important source of evidence base to help others make informed decisions about their practice. At present, there are significant variations in the information reported in laboratory medicine journal publications describ- ing the analytical performance of measurement procedures. These variations also chal- lenge authors, readers, reviewers, and editors in deciding the quality of a submitted manu- script. The International Federation of Clinical Chemistry and Laboratory Medicine Working Group on Method Evaluation Protocols (IFCC WG-MEP) developed a checklist and recom- mends its adoption to enable a consistent approach to reporting method evaluation and analytical performance characteristics of measurement procedures in laboratory medicine journals. It is envisioned that the Laboratory Evaluation and Analytical Performance Char- acteristics (LEAP) checklist will improve the standardisation of journal publications describ- ing method evaluation and analytical performance characteristics, improving the quality of the evidence base that is relied upon by practitioners.