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이태일,최명률,박인철,김홍배 한국진공학회 2002 Applied Science and Convergence Technology Vol.11 No.3
본 논문에서는 p-type (100)Si, (100)MgO 그리고 MgO/si 기판 위에 RF Magnetron sputtering 법으로 $Ba_{0.5}Sr_{0.5}TiO_3$(BST)박막을 증착하였다. BST 박막 증착 후 RTA(Rapid Thermal Annealing)를 이용하여 $600^{\circ}C$에서 산소분위기로 1분간 고온 급속 열처리를 하였다. 증착된 BST박막의 결정화를 조사하기 위해 XRD(X-Ray Diffraction)측정을 한 결과 모든 기판에서 (110) $Ba_{0.5}Sr_{0.5}TiO_3$(의 주피크가 관찰되어졌고, 열처리 후 재결정화에 기인하여 피크 세기가 증가함을 관찰할 수 있었다. Al 전극을 이용한 커패시터 제작 후 측정한 C-V(Capacitance-Voltage) 특성에서 각각의 기판에서 측정된 커패시턴스 값으로 계산된 유전율은 120(bare Si), 305(Mgo/Si) 그리고 310(MgO)이었다. 누설 전류 특성에서는 0.3 MV/cm이내의 인가전계에서 1 $\mu\textrm{A/cm}^2$ 이하의 안정된 값을 보여주었다. 결론적으로 MgO 버퍼층을 이용한 기판이 BST 박막의 증착을 위한 기판으로써 효과적임을 알 수 있었다. In this paper, We deposited the BST thin-film on p-type (100)Si, (100)MgO and MgO/Si substrates respectively using RF magnetron sputtering method. After the BST thin-fil m was deposited, we performed RTA(rapid thermal anneal) at $600^{\circ}C$, oxygen atmosphere and 1 min. In the XRD measurement, we observed the (110) $Ba_{0.5}Sr_{0.5}TiO_3$ main peak in all samples and the peak intensity increased after post annealing. Then we manufactured a capacitor using Al Electrode and measured I-V, C-V. In C-V measurement result values for each substrate, dielectric constant was calculated 120 (bare Si), 305(MgO/Si), 310(MgO) respectively. A leakage current density was present less than 1 $\mu\textrm{A/cm}^2$ at applied fields below 0.3 MV/cm. In conclusion we confirmed that MgO/Si substrates give good results for BST thin-film deposition.
이태일 淸州大學校 都市·地域開發硏究所 2000 都市·地域開發硏究 Vol.8 No.1
The structure of world economy is changing at an alarming speed, and so are those of the regional as well as the local economies. Awesome advancement in the information technology is playing the key role in these new and significant changes. Korea, once a hermit kingdom, is now at the heart of these structural changes and its economy is quickly transforming itself towards a post-industrial model. Traditional industries are also adapting to these world wide trends and now not a single industry is viable without the information connection to the outer-world for its survival. As such, the flare of its knowledge-based information and communication industry has become the critical factor in determining any region's competitiveness in the world market. Recognizing the importance of the If industries in enhancing the strength of the regional economy, Chungbuk Province has been active in attracting these hot industries onto its land to stimulate its lagging economy. Number of specially suited science and technology Parks are in the Process of preparation and diverse policy packages has been suggested to lure the promising IT industries. Easy access to the huge markets and to the ample number of incubating venture firms in the Capital Region, and also the geographical proximity to the Science & Research Park in near by Daeduk is paraded as substantial merits in locating within Chunghuk Province. The progress so far is, nonetheless, slow. Number of small and medium IT venture companies did locate sporadically along the Chungbu Expressway corridor which is still far from being called a sort of venture valley. Their presence is, at the moment, not significant enough to bolster the regional economy as the policy makers would like to see. The amount of If production itself is sizable mainly due to the existence of a few semi-conductor factories in the region. But the main functions of these establishments are limited to lower-end assemblying and manufacturing, and do not necessarily involve activities at the higher-end of the ladder; namely research and new technology development. Likewise, the current If industry in Chungbuk is seriously lacking high value-adding functions like software and network development. This paper tries to evaluate past and present efforts in attracting the If industries by the Chungbuk Province. It critically assesses the conditions we have here compared with the factors which, in general, are considered prerequisite in forming a successful venture IT industrial agglomerates. Unfortunately, the so-called localization economy, collective learning environment, embedding and institutional endowments, innovative synergy are all the critical factors that are seldom found in the region. Chungbuk is not unique in this regard when we recall the massive and overwhelming concentration of virtually everything in Seouland its surrounding Capital Region. However, relatively easy access to the Capital Region, the presence of numerous quality educational institutions and the Science and Technology Parks in preparation, and the vigorous and flexible policy packages are the brighter sides we have. Promising If venture firms and individuals could be attracted to the region through consistent long-term investment and more interactive policy enforcement. Excessive emphasis on physical development or expansion is less effective or even unnecessary. Local governments should provide most favorable environment and diverse programs that encourage and protect these newly hatching venture activities, thus playing the role of a seedbed or an incubator. The change in mind-set among both policy makers and local citizens that future of Chungbuk IT industry depends not on the "capacity to manufacture" but on the"capacity to think and develop" perhaps might be the single most crucial pre-condition that we have to bear in mind. Only then, the environments could slowly turn around toward further strengthening the regional economy through the flourishing If industries.