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마이크로 열 센서용 측온저항체 온도센서의 제작 및 특성
정귀상(Gwiy Sang Chung),홍석우(Seog Woo Hong) 한국센서학회 2000 센서학회지 Vol.9 No.3
The physical and electrical characteristics of MgO and Pt thin-films on it, deposited by reactive sputtering and rf magnetron sputtering, respectively, were analyzed with annealing temperature and time by four-point probe, SEM and XRD. Under annealing conditions of 1000℃ and 2 hr, MgO thin-film had the properties of improving Pt adhesion to SiO₂ and insulation without chemical reaction to Pt thin-film, and the sheet resistivity and the resistivity of Pt thin-film deposited on it were 0.1288 Ω/□ and 12.88μΩ·㎝, respectively. We made Pt resistance pattern on SiO₂/Si substrate by lift-off method and fabricated thin-film type Pt-RTD(resistance thermometer device) for micro thermal sensors by Pt-wire, Pt-paste and SOG(spin-on-glass). In the temperature range of 25∼400℃, the TCR value of fabricated Pt-RTD with thickness of 1.0 ㎛ was 3927 ppm/℃ close to the Pt bulk value. Resistance values were varied linearly within the range of measurement temperature.
백금-코발트 합금박막을 이용한 측온저항체 온도센서의 제작
정귀상,홍석우,박정도 東西大學校 1998 동서논문집 Vol.4 No.-
Platinum-Cobalt alloy thin films were deposited on Al₂O₃substrates by r.f. cosputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterms on the Al₂O₃substrates by lift-off method and investigated the physical and electrical characteristics of these films under various conditions (the input power, working vacuum, annealing temperature, thickness of thin films) and also after annealing these films. At input power of Pt: 44 W/㎠, Co: 6.91 W/㎠, working vacuum of 10 mTorr and annealing conditions of 1000℃ and 60 min, the resistivity and sheet resistivity of Pt-Co thin films was 15 μΩ·cm and 0.5 Ω/□, respectively. The TCR value of Pt-Co alloy thin films was measured with various thickness of thin films and annealing conditions. The optimum TCR value is gained under conditions 3000 A of thin films thickness and 1000℃ of annealing temperature. These results indecate that Pt-Co alloy thin films have potentiality for the high resolution RTD temperature sensors.
Pt-Co 합금박막형 측온저항체 온도센서의 제작과 그 특성
홍석우,최영규,정귀상 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
We made Pt-Co alloy resistance patterns on the Al_(2)O_(3) substrates by lift-off method and investigated the physical and electrical characteristics of these films under various conditions (the input power, working vacuum, annealing temperature, thickness of thin films) and also after annealing these films. The TCR value of Pt-Co alloy thin films was measured with various thickness of thin films and annealing conditions. The optimum TCR value is gained under conditions 3000Å of thin films thickness and 1000°C of annealing temperature. These results indicate that Pt-Co alloy thin films have potentiality for the high resolution RTD temperature sensors.
정귀상,홍석우,김순철 東西大學校 1998 동서논문집 Vol.4 No.-
Electro Discharge Machining(EDM) is a so-call nonconventional machining technique. This paper presents the experimental results of an EDM technique for the fabircation of microholes on #7440 pyrex glass substrates. With various applied voltages and various concentration of NaOH or KOH solution, the glass substrates have been microdrilled using the copper electrodes of which diameters are 250 ㎛ 새 450 ㎛. The machined throughholes have been observed the top diameter, the bottom diameter and machining time have been measured. EDM in NaOH solution causes the fabrication to have better the surface condition, higher selective of electrode, lower concentration of solution with respect to EDM in KOH solution machined fabrication.