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김현세(Hyunse Kim),임의수(Euisu Lim) 대한기계학회 2021 大韓機械學會論文集B Vol.45 No.9
음파 및 초음파의 파동에너지는 세정, 의료용 센서, 제조 공정 분야에서 널리 사용되고 있다. 본 논문에서는 마이크로칩의 냉각에 응용될 수 있는 파동 냉각장치의 설계와 제작 공정에 대하여 설명하고 있다. 이 시스템을 설계할 때, 실험계획법을 이용하여 네 개의 설계 변수를 최적화하였다. 최적화된 값을 이용하여, 385 Hz급 음향 냉각기 시제품을 제작하고 성능 테스트를 수행하였다. 그 결과 1.5 V로 전압을 가하고, 단열을 한 경우에 제일 우수하였으며, ΔT=8.5°C 및 주변온도 대비 5.0°C를 냉각하였다. 마지막으로 냉각량을 계산한 결과 0.125 W의 성능을 예측하였다. 이러한 결과를 바탕으로 볼 때, 개발된 음향 냉각 장치는 향후 마이크로칩 등의 냉각 장치 개발에 활용될 수 있을 것으로 보인다. The wave energy of sound and ultrasound has been widely used in industries such as cleaning, medical sensors, and manufacturing. In this paper, the design and fabrication processes of a wave cooling system for microchip cooling applications are explained. When designing the system, the design of experiments was used to optimize four design parameters. Using the optimized values, a prototype cooler was fabricated that could work with a 385 Hz frequency, and a performance test was conducted. Consequently, when a 1.5 V voltage was applied with an insulation condition, ΔT=8.5°C and 5.0°C cooling were achieved. Finally, the cooling power was calculated, which showed the ability of 0.125 W. Based on these results, it is believed that the developed wave cooling system will be applicable in microchip cooling.
Design, Fabrication and Test of an Ultrasonic Waveguide for Cleaning Solar Cell Wafers
김현세(Hyunse Kim),임의수(Euisu Lim),이양래(Yanglae Lee) Korean Society for Precision Engineering 2021 한국정밀공학회지 Vol.38 No.11
Until recently, solar energy has been considered as a promising regeneration energy source in the future. Solar cell wafer production involves ingot cutting, cleaning, and packaging processes. In this research, design, fabrication, and testing of a batch-type midsonic for cleaning solar cell wafers were carried out. To reduce the damage compared to conventional systems, we decided to use 400 kHz in a midsonic wave range, and we used far-field to obtain a more regular acoustic pressure. Finite element analysis with Ansys software predicted an anti-resonance frequency of 458 kHz for an ultrasonic waveguide, and the measured result of the fabricated system was 454 kHz with a 0.9% error. Acoustic pressures were measured, and the result confirmed regular and high distributions. Finally, cleaning tests were performed, and a 90% particle removal efficiency (PRE) was achieved at 900 W. Thus, the newly developed midsonic cleaning system can be considered to clean particles on solar cell wafers efficiently while preventing damage.
Quartz Megasonic System for Cleaning Flat Panel Display
Hyunse Kim(김현세),Yanglae Lee(이양래),Euisu Lim(임의수) Korean Society for Precision Engineering 2014 한국정밀공학회지 Vol.31 No.12
In this article, the megasonic cleaning system for cleaning micro/nano particles from flat panel display (FPD) surfaces was developed. A piezoelectric actuator and a waveguide were designed by finite element method (FEM) analysis. The calculated peak frequency value of the quartz waveguide was 1002 ㎑, which agreed well with the measured value of 1003 ㎑. The average acoustic pressure of the megasonic cleaning system was 43.1 ㎪, which is three times greater than that of the conventional type of 13.9 ㎪. Particle removal efficiency (PRE) tests were performed, and the cleaning efficiency of the developed system was proven to be 99%. The power consumption of the developed system was 64% lower than that of the commercial system. These results show that the developed megasonic cleaning system can be an effective solution in particle removing from FPD substrate with higher energy efficiency and lower chemical and ultra pure water (UPW) consumption.