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할로겐 플라즈마에 의한 Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> 식각 데미지 연구
장윤창,유찬영,유상원,권지원,김곤호,Jang, Yun Chang,Yoo, Chan Young,Ryu, Sangwon,Kwon, Ji Won,Kim, Gon Ho 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.4
Effect of Ge2Sb2Te5 (GST) chalcogen composition on plasma induced damage was investigated by using Ar ions and F radicals. Experiments were carried out with three different modes; the physical etching, the chemical etching, and the ion-enhanced chemical etching mode. For the physical etching by Ar ions, the sputtering yield was obtained according to ion bombarding energy and there was no change in GST composition ratio. In the plasma mode, the lowest etch rate was measured at the same applied power and there was also no plasma induced damage. In the ion-enhanced chemical etching conditions irradiated with high energy ions and F halogen radicals, the GST composition ratio was changed according to the density of F radicals, resulting in higher roughness of the etched surface. The change of GST composition ratio in halogen plasma is caused by the volatility difference of GST-halogen compounds with high energy ions over than the activation energy of surface reactions.
김진영(Jin Young Kim),김선도(Sun Do Kim),유찬영(Chan Young Yoo),김증호(Jeung Ho Kim),홍용수(Yong Soo Hong),박정근(Jung-Keun Park),고광석(Kwang-Seog Koh) 대한인간공학회 2009 대한인간공학회 학술대회논문집 Vol.2009 No.5
본 연구는 기타사업(비제조업) 중 산업재해 다발업종이며 대표적 비정형 작업인 건물등의 종합관리업 종사근로자들의 주요 작업별(경비, 환경미화, 시설관리, 주차관리, 기타) 인간공학적 위험요인을 평가하고, 설문조사를 통해 가장 힘든작업으로 파악된 왁스작업에 대한 노출평가를 통해 향후 동종 업종 종사자들의 근골격계질환 예방하기 위한 기초자료를 제공하고자 한다.
김현호(Hyun Ho Kim),박현진(Hyun Jin Park),박기혁(Ki Hyuk Park),김욱(Wook Kim),유찬영(Chan Young Yoo),김증호(Jeung Ho Kim),박정선(Jung Sun Park) 대한인간공학회 2009 大韓人間工學會誌 Vol.28 No.3
This study was aimed to analyze of characteristics of Musculoskeletal disorders (MSDs) based on the industrial accident statistics which were extracted from the Ministry of Labor. In this study all MSDs cases in 2007, 7,723 cases, were investigated. First of all, for the analysis of a wide view point concerning the characteristics of MSDs, We have inspected characteristics of the user population (i.e. age, gender, employed periods, etc.). Secondly, work-related risk factors such as repetitive motions, awkward postures, manual material handling were analyzed in terms of disease code, injured part of body, types of business, etc. Next, characteristics of handling of heavy materials were analyzed according to weight, types of handling, agency of cause, etc. Finally, we have compared and analyzed the features between the period of hospitalization and other variables. In addition to that we also conducted statistics analysis. The study results showed that there were significant characteristics of MSDs that could be used as basis data for the MSDs prevention policy.