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Dependence of Sputtering Gas Pressure on the Crystal Structure of AlN Films
M. J. Ko(고명진),S. K. Oh(오승근),S. S. Park(박순섭) Korean Society for Precision Engineering 2021 한국정밀공학회 학술발표대회 논문집 Vol.2021 No.11월
Aluminum nitride (AlN) film is an important material with many potential applications, because of its wide band gap (6.2 eV), high dielectric strength, high temperature stability, chemical inertness, high thermal conductivity, and high acoustic velocity. Further, AlN films have also been used as buffer layers for stabilization and adhesion of the cubic boron nitride (c-BN) films. AlN films have been grown on silicon substrates using different growth techniques such as chemical vapor deposition (CVD), reactive sputtering, plasma assisted molecular beam epitaxy, and pulsed laser deposition. The choice of Si as the substrate for the growth of AlN films has the advantage of its easy integration into the existing device technology. In this work, dependence of sputtering gas (Ar : N₂ = 1 : 3) pressure on the crystal structure of AlN films deposited via RF magnetron sputter of Al target in the environment of at room temperature is reported. The films were analyzed with SEM, XRD and FTIR for crystal structure and surface morphology. At higher sputtering gas pressure, the orientation of AlN is (1 0 1) whereas at lower pressure (0 0 2) orientation was observed.
손정문(J M Sohn),박재갑(J G Park),오승근(S K Oh),박용현(Y H Park),최국진(K J Choe),김수태(S T Kim) 대한소화기학회 1982 대한소화기학회지 Vol.14 No.2
N/A Authors reviewed 8 cases of non-traurnatic hemobilia from Oct. 1st 1975 to Sep. 30th 1982, at the Department of Surgery, Seoul National University Hospital and arrived at the following conclusions. 1)Hemobilia associated with hepatobiliary malignancy were 5 cases, and hemobilia associated with hepatobiliary inflammation were 3 cases. 2) The main symptom of hemobilia associated with hepatobiliary malignancy was mostly jaundice, but those associated with hepatobiliary inflammation was gastrointeatinal bleeding. 3) 0ccult blood in feces proved very important in diagnosing hemobilia associated with hepatobiliary maligncies. 4) Blood clots in the common bile duct in patients with malignancies were helpful in confirming the diagnosis of original disease. 5) In cases of obstructive jaundice associated with hepatobiliary malignanies hemobilia must be considered in diagnosis 6) In cases of massive gastrointestinal bleeding of unknown origin, hemobilia must be considered in diagnosis, especially when the patient has a history of biliary colic, and also the exploration of the hepatobiliary area is mandatory during surgery 7) The possibility of blood clots due to minor bemobilia must be considered in differential diagnosis of filling defects in postoperative cholongiograms and unnecesary surgery must be avoided. 8) Ligation of hepatic artery branch was effective in treating symptomatic non-trarmatic hemobilia.