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오현주,장동영,양희남,김동환,박만진,심치형,김충수 한국공작기계학회 2005 한국공작기계학회 춘계학술대회논문집 Vol.2005 No.-
We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.
장동영,김동환,박근,박만진,양희남,김충수,정현우,한동철 한국생산제조학회 2006 한국생산제조시스템학회 학술발표대회 논문집 Vol.2006 No.5
A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.
김일해,김진현,박만진,김종혁,양희남,장동영 한국공작기계학회 2004 한국생산제조학회지 Vol.13 No.5
Chatter monitoring is also important for realizing an unmanned machining system. While many researches were done on this area, it is still a difficult job to detect very small amplitude amount of chattering. A monitoring system using a capacitive spindle displacement sensor was developed to monitor cutting vibration in turning in this research. The variance of the measured spindle displacement signals using the developed sensor was calculated and utilized to quantify the small vibration in machining. The results were compared with variance obtained using a tool dynamometer. The result showed that the developed system could be utilized in monitoring the subtle changes of cutting vibrations with high sensitivity confidence.
장동영,김동환,박근,박만진,양희남,김충수,정현우,한동철 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.
장동영(Jang Dong-Young),김동환(Kim Dong-Hwan),박만진(Park Man-Jin),양희남(Yang Hee-Nam) 한국생산제조학회 2005 한국생산제조시스템학회 학술발표대회 논문집 Vol.2005 No.10
The scanning electron microscope(SEM) is an important research and production tool extensively used in many phases of industry throughout the world. The popularity of the instrument results from the need to inspect and obtain information about samples with ever-decreasing structure. The SEM provides higher resolution analysis and inspection than that afforded by current techniques using the optical microscope. Furthermore, unlike the optical microscope, the SEM offers a wide variety of analytical modes, each contributing unique information regarding the physical, chemical, and electrical properties of a particular specimen, device, or circuit.
오현주(H. J. on),장동영(D. Y. Chang),양희남(H. N. Yang),김동환(D. H. Kim),박만진(M. J. Park),심치형(C. H. Shim),김충수(C. S. Kim) 한국생산제조학회 2005 한국생산제조시스템학회 학술발표대회 논문집 Vol.2005 No.5
We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.
장동영(Jang Dong-Young),김동환(Kim Dong-Hwan),박만진(Park Man-Jin),양희남(Yang Hee-Nam) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
The scanning electron microscope(SEM) is an important research and production tool extensively used in many phases of industry throughout the world. The popularity of the instrument results from the need to inspect and obtain information about samples with ever-decreasing structure. The SEM provides higher resolution analysis and inspection than that afforded by current techniques using the optical microscope. Furthermore, unlike the optical microscope, the SEM offers a wide variety of analytical modes, each contributing unique information regarding the physical, chemical, and electrical properties of a particular specimen, device, or circuit.
정전기렌즈에 의한 전계방출 전자빔 방출 특성 해석 및 실험
김충수(Chung-Soo Kim),박만진(Man-Jin Park),양희남(Hee-Nam Yang),장동영(Dong-Young Jang),김동환(Donghwan Kim),한동철(Dong-Chul Han),안성훈(Sung-Hoon Ahn) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
A field emission electron gun including three electrodes which are one cathode and two anodes is very crucial for high resolution electron beam applications. To have functions of controlling the initially-emitted electron beam from cathode, two anodes have to form proper equi-potential lines between two anodes (electrostatic lens) being capable of adjusting the beam intensity. To verify the action of electrostatic lens by changing some parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated with OPERA-3D. In addition, electron beam behaviors, angular beam intensity (distribution), in three electrodes were tested.