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박만진(Man-Jin Park),김동환(Dong Hwan Kim),김영대(Young-Dae Kim),장동영(Dong Young Jang),한동철(Dong-Chul Han) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
The most powerful analytical equipment usually comes at the cost of having the highest demand for space. Where electron microscopes has traditionally required a room to themselves, not just for reasons of their size but because of ancillary demands for pipes and service. The simple optical microscopes, of course, can occupy the desk-top, but because their performance is limited by the wavelength of light, their powers of magnification and resolution are inferior to that of the electron microscope. Mini SEM will sit comfortably on a desk-top but offers magnification and resolution performances much closer to that of a standard SEM. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples.
박만진(Man-Jin Park),김일해(Il-Hae Kim),김동환(Dong-Hwan Kim),장동영(Dong-Young Jang),한동철(Dong-Cheol Han) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
The most powerful analytical equipment usually comes at the cost of having the highest demand for space. Where electron microscopes has traditionally required a room to themselves, not just for reasons of their size but because of ancillary demands for pipes and service. The simple optical microscopes, of course, can occupy the desk-top, but because their performance is limited by the wavelength of light, their powers of magnification and resolution are inferior to that of the electron microscope. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples.
박근(Keun Park),박만진(Man-Jin Park),김동환(Dong-Hwan Kim),장동영(Dong-Young Jang) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.6
A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.
정전기렌즈에 의한 전계방출 전자빔 방출 특성 해석 및 실험
김충수(Chung-Soo Kim),박만진(Man-Jin Park),양희남(Hee-Nam Yang),장동영(Dong-Young Jang),김동환(Donghwan Kim),한동철(Dong-Chul Han),안성훈(Sung-Hoon Ahn) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
A field emission electron gun including three electrodes which are one cathode and two anodes is very crucial for high resolution electron beam applications. To have functions of controlling the initially-emitted electron beam from cathode, two anodes have to form proper equi-potential lines between two anodes (electrostatic lens) being capable of adjusting the beam intensity. To verify the action of electrostatic lens by changing some parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated with OPERA-3D. In addition, electron beam behaviors, angular beam intensity (distribution), in three electrodes were tested.
ALD로 저온에서 증착된 TiO<sub>2</sub> 박막의 막질에 대한 연구
박원희,신정우,양병찬,박만진,장동영,안지환,Park, Won Hee,Shin, Jeong Woo,Yang, Byung Chan,Park, Man-Jin,Jang, Dong Young,An, Jihwan 한국마이크로전자및패키징학회 2016 마이크로전자 및 패키징학회지 Vol.23 No.2
본 논문은 저온(<$150^{\circ}C$)에서 원자층 증착법(ALD)으로 증착된 $TiO_2$ 박막의 물리적, 화학적 막질에 대한 연구 결과를 보여준다. $TiO_2$의 ALD는 TTIP(Titanium(IV)isopropoxide)와 물을 이용하여 진행되었다. $150^{\circ}C$ 미만에서 증착시, ALD $TiO_2$의 성장률은 약 $0.3{\AA}/cycle$로 증착 온도 및 위치에 상관없이 거의 일정한 성장률을 보였다. 또한 SEM분석에서는 $200^{\circ}C$ 이상에서의 증착과 대조적으로, $150^{\circ}C$ 미만에서 증착된 박막은 부드러운 표면을 보였다. 투과전자현미경(TEM) 분석을 통해 이러한 특징이 저온에서 균질한 비정질의 막이 증착되었기 때문이라는 점을 알 수 있었다. 또한 저온 증착임에도 불구하고 종횡비가 1:75인 고종횡비 구조에도 80% 이상의 형상 적응성을 보였다. 그러나 저온 증착의 영향으로 X-선 광전자 분광기(XPS) 분석을 통해 4~7 at% 정도 함량의 탄소 불순물이 검출됨을 확인하였다. This paper covers the study on the properties of $TiO_2$ film deposited by atomic layer deposition (ALD) using TTIP and water at various temperatures including the low temperature range of <$150^{\circ}C$. At low deposition temperature, ALD $TiO_2$ films showed uniform growth rate per cycle ($0.3{\AA}/cycle$), good uniformity, smooth surface, and homogenous amorphicity. They also showed good conformality of >80% on the trench structure with the high aspect ratio of up to 75. However, relatively high concentration of impurities (C~4-7 at%) in the film was observed due to low deposition temperature.
이정우 ( Jung Woo Lee ),박만진 ( Man Jin Park ) 대한임상검사과학회 1998 대한임상검사과학회지(KJCLS) Vol.30 No.2
The stool specimens of 2,125 patients visited Yeung Nam University Medical Center were tested for Clonorchis sinensis infection with the method of Cellophan tick smear and the method of Formalin-Ether sedimentation from Feburary 1, 1998 to April 3, 1998. This test appeared the following result. we obtained the result that 205 infected patients suffered from Clonorchis sinensis infection from among total of 2,125 tested patients and it appeared the infection rate of 9.6%. among 1,353 male patients, 171 positive patients were detected. male infection percentage is 12.6%. among 772 female patients, 34 positive patients were detected. female infection percentage is 4.4%. according to age-group, infection rate begins at increase about 30-39 age and endures to 60-69 age. after patient’s age is 70, infection rate begins at decrease.