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FeZrBAg 자성막을 이용한 박막 인덕터의 임피던스 특성
송재성(J. S. Song),민복기(B. K. Min),허정섭(J. S. Heo),김현식(H. S. Kim) 한국자기학회 2000 韓國磁氣學會誌 Vol.10 No.5
Double rectangular spiral thin-film inductors were fabricated using Fe_(86.7)Zr_(3.3)B₄Ag_6 thin film with high permeability and resistance, in which easy axis of magnetization of the thin-film was perpendicular or parallel to the current direction. The perpendicular geometry inductor revealed higher inductance than the parallel geometry one, because spin aligns of magnetic film were more easily along the field direction due to higher field intensity in the perpendicular geometry. The increase of the inductance, however, resulted in the decrease of resonance frequency. The permeability was monitored by annealing the thin-films at different temperatures. With increasing the permeability, the inductance increased, but total resistance also increased due to the increase in magnetic core loss. As the resonance frequency was higher in air-core inductor than in magnetic thin-film core inductor, it is suggested to increase the resonance frequency that the characteristic of air-core inductor rather than the magnetic properties of the thin-film should be enhanced.