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CBD로 제조한 Cd(Cu)S/CdS 다이오드의 전기광학특성
조두희(Doo-Hee Cho),송기봉(Gi-Bong Song),박상희(Sang-Hee Ko Park),추혜용(Hye-Yong Chu) 대한전자공학회 2006 대한전자공학회 학술대회 Vol.2006 No.11
In this paper, we have manufactured CdS/Cd(Cu)S thin film diodes by chemical bath deposition (CBD) process, and examined the effects of NH₄Cl and TEA. The addition of NH₄Cl remarkably enhanced the film thickness of CdS, however, TEA slightly decreased the film thickness. The thickness of CdS film prepared from the aqueous solution of 0.003 M CdSO₄, 0.00008 M CuSO₄, 1.3 M NH3, 0.03 M SC(NH₂)₂ and 0.0009 M NH₄C1 was 210 ㎚ and resistivity of that was 1.2×10³ Ω㎝. The thin film diode prepared by CBD showed good rectifying characteristics.