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유리 - 유리 정전접합을 이용한 FED 스페이서 기술 개발
김민수(Minsoo Kim),박세광(Sekwang Park),문권진(Kwonjin Moon),김관수(Kwansoo Kim),우광제(Kwange Woo),정성재(Sungjae Jung),이남양(Namyang Lee) 한국진공학회(ASCT) 1999 Applied Science and Convergence Technology Vol.8 No.4(1)
본 논문에서는 Al 박막을 중간층으로 이용한 유리-유리 정전접합기술로서 FED(Field Emission Dispaly)의 스페이서 공정을 개발하였다. Al 박막의 두께가 1000 Å, 2000 Å, 3000 Å, 4000 Å과 5000 Å인 정합 조건에서 유리-유리 정전접합의 특성과 전류 밀도-시간 곡선 그리고 접합력을 측정하였으며, 감광성 유리와(110) 실리콘웨이퍼를 벌크 마이크로머시닝 기술을 이용하여 스페이서의 고정틀로 제작하였다. 스페이서 유리-유리 정전정합으로 맨 유리기판에 스페이서를 형성하였으며, 또한 이를 진공 패널로 제작하여 FED에서의 응용 가능성을 확인하였다. In this paper, spacer process for FED (Field Emission Display) was developed with the glass to glass anodic bonding technology using Al film as an interlayer. Characteristics, current density-time curves and force of the anodic bonding were measured on various thickness of Al film; 1000 Å, 2000 Å, 3000 Å, 4000 Å and 5000 Å. Holders for spacer were fabricated with photosensitive glass and (110) Si wafer by bulk micromachining. Spacers was formed on glass substrate by spacer glass to glass anodic bonding and an evacuated panel was fabricated to prove the potential of application for FED.
2층 구조 유기 박막 EL 소자의 전기 - 광학적 특성
김민수,박세광 ( Minsoo Kim,Sekwang Park ) 한국센서학회 1995 센서학회지 Vol.4 No.4
Organic thin film electroluminescent(EL) cells were fabricated. Their output characteristics and luminance versus voltage characteristics were measured with different work function metal electrodes. The EL structure was Indium-Tin-Oxide(ITO)/hole transport layer/emission layer(electron transport layer)/metal electrode. PMMA+TPD(0.5 wt%), MC homopolymer+TPD(0.005 wt%) and (MC/MMA) copolymer+TPD(0.005 wt%) were used as hole transport layer. Ca, Mg, Mg:Ag(10:1) and A1 were used as metal electrode. I-V output showed exponential feature, and the threshold voltage of 5 volts and the luminance of over 700 Cd/㎡ at 10 volts were observed.
권기진,김민수,박세광 ( Kijin Kwon,Minsoo Kim,Sekwang Park ) 한국센서학회 1995 센서학회지 Vol.4 No.4
Sensor system which can detect a flowing cell is designed and fabricated by semiconductor processing and EDM(Electro-chemical Discharge drilling Method). Two methods are used in this paper 1) optical method which measures the trasmitted light through the cell passage between transmitter and receiver, 2) impedance method which measures impedance change between electrodes, when cell flows in the cell passage. Experimental result using tabaco leaves shows that the output value by optical method is 0.2V to 0.7V, and the output by impedance method is 0.2V to 2V, which is bigger, but it includes an avoidable noises.
김민수,박세광 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
This research is about a new spacer process using electrostatic bonding technology for FED. Si jig made in Si bulk micromachining technology was used for holding spacers. Transparent ceramic spacers with width 100μm and height 300μm were bonded and formed by electrostatic bonding technology on glass substrate deposited Al film.