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Ti<sub>3</sub>O<sub>5</sub>/SiO<sub>2</sub> 다층박막를 이용한 협대역 칼라투과필터 제작 및 특성연구
박문찬,고견채,이화자,Park, Moon-Chan,Ko, Kyun-Chae,Lee, Wha-Ja 한국안광학회 2011 한국안광학회지 Vol.16 No.4
목적: $Ti_3O_5$와 $SiO_2$를 이용하여 중심파장이 500 nm에서 반치폭이 약 12 nm이고 투과율이 99%인 협대역 칼라투과필터를 제작하고, 이 칼라필터의 박막 특성을 연구하고자 한다. 방법: 두께 800 nm인 $Ti_3O_5$박막과 $SiO_2$박막의 투과율로부터 박막의 광학상수 n(굴절률)과 k(소멸계수)를 구하였고, Essential Macleod program을 이용하여 중심파장이 500 nm에서 반치폭이 약 12 nm이고 투과율이 99%인 협대역 칼라투과필터의 필터층과 AR 코팅층을 설계하였다. 또 한 electron beam evaporation 장치를 이용하여 $Ti_3O_5/SiO_2$ 다층막 칼라필터을 만든 후, 분광광도계를 이용하여 투과율을 측정하였고, SEM 사진에 의한 칼라필터의 단면으로부터 칼라필터의 박막두께와 층수를 알 수 있었고, XPS분석으로부터 박막 성분을 분석하였다. 결과: 칼라필터의 AR 코팅층의 최적조건은 6층으로 [air$|SiO_2(90)|Ti_3O_5(36)|SiO_2(5)|Ti_3O_5(73)|SiO_2(30)|Ti_3O_5(15)|$ glass]이며, 반치폭이 12 nm인 칼라필터의 필터층의 최적조건은 41층으로 [air$|SiO_2(20)|Ti_3O_5(64)|SiO_2(102)|Ti_3O_5(66)|SiO_2(112)|Ti_3O_5(74)|SiO_2(120)|Ti_3O_5(68)|SiO_2(123)|Ti_3O_5(80)|SiO_2(109)|Ti_3O_5(70)|SiO_2(105)|Ti_3O_5(62)|SiO_2(99)|Ti_3O_5(63)|SiO_2(98)|Ti_3O_5(51)|SiO_2(60)|Ti_3O_5(42)|SiO_2(113)|Ti_3O_5(88)|SiO_2(116)|Ti_3O_5(68)|SiO_2(89)|Ti_3O_5(49)|SiO_2(77)|Ti_3O_5(48)|SiO_2(84)|Ti_3O_5(51)|SiO_2(85)|Ti_3O_5(48)|SiO_2(59)|Ti_3O_5(34)|SiO_2(71)|Ti_3O_5(44)|SiO_2(65)|Ti_3O_5(45)|SiO_2(81)|Ti_3O_5(52)|SiO_2(88)|$ glass] 이었다. 위의 데이터를 이용하여 제작한 칼라필터는 SEM 사진에 의해 41층으로 확인되었으며, XPS 분석에 의해 $SiO_2$층이 맨 위층이며 $Ti_3O_5$층과 교번인 다층막으로 형성돼 있으며, $Ti_3O_5$박막 형성 시 TiO2 박막과 $Ti_3O_5$박막이 섞여 형성됨을 알 수 있었다. 결론: 41층의 $Ti_3O_5/SiO_2$ 다층박막을 이용하여 12 nm 반치폭을 갖으며 500 nm 중심파장에서 투과율은 99%인 협대역 칼라투과필터를 제작하였으며, 이 칼라필터는 $Ti_3O_5$박막 형성 시 TiO2 박막과 $Ti_3O_5$박막이 섞여 형성됨을 알 수 있었다. Purpose: The narrow-band pass color-filters with a 500 nm central wavelength and 12 nm FWHM using $Ti_3O_5/SiO_2$ mutilayer were fabricated, and their characteristics and structures were studied. Methods: the optical constants, n and k, of the $Ti_3O_5$ and $SiO_2$ thin films were obtained from the transmittances of their thin film. The narrow-band pass color-filters were designed with these optical constants and the AR coating of the filter was also designed. $Ti_3O_5/SiO_2$ multilayer filters were made by electron beam evaporation apparatus and the transmittaces of the filters were measured by spectrophotometer. the number of layers and the thicknesses of filters were calculated from the cross section of filters by SEM image and the composition of filters was analysed by XPS analysis. Results: The optimization of AR coating for the narrow-band pass color-filter was [air$|SiO_2(90)|Ti_3O_5(36)|SiO_2(5)|Ti_3O_5(73)|SiO_2(30)|Ti_3O_5(15)|$ glass], and the optimization of filter layer for the color filter was [air$|SiO_2(192)|Ti_3O_5(64)|SiO_2(102)|Ti_3O_5(66)|SiO_2(112)|Ti_3O_5(74)|SiO_2(120)|Ti_3O_5(68)|SiO_2(123)|Ti_3O_5(80)|SiO_2(109)|Ti_3O_5(70)|SiO_2(105)|Ti_3O_5(62)|SiO_2(99)|Ti_3O_5(63)|SiO_2(98)|Ti_3O_5(51)|SiO_2(60)|Ti_3O_5(42)|SiO_2(113)|Ti_3O_5(88)|SiO_2(116)|Ti_3O_5(68)|SiO_2(89)|Ti_3O_5(49)|SiO_2(77)|Ti_3O_5(48)|SiO_2(84)|Ti_3O_5(51)|SiO_2(85)|Ti_3O_5(48)|SiO_2(59)|Ti_3O_5(34)|SiO_2(71)|Ti_3O_5(44)|SiO_2(65)|Ti_3O_5(45)|SiO_2(81)|Ti_3O_5(52)|SiO_2(88)|$ glass]. It was known that the color-filters fabricated by the simulation data were composed of 41 layers by SEM image and the top layer of filters was $SiO_2$ layer and the filters were composed of $SiO_2$/$Ti_3O_5$ multilayer by XPS analysis. It was also known that the mixed thin film of TiO2 and $Ti_3O_5$ was made during the deposition of the $Ti_3O_5$ material. Conclusions: The narrow-band pass color-filters with a 500 nm central wavelength and 12 nm FWHM using $Ti_3O_5/SiO_2$ mutilayer of 41 layer were fabricated, and it was known that the mixed form of TiO2 and $Ti_3O_5$ thin film was made during the deposition of the $Ti_3O_5$ material.
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박문찬(Moon Chan Park),최혜정(Hae Jung Choi),진가헌(Ko Hsien Chen),조동수(Dong Soo Cho) 한국안광학회 2001 한국안광학회지 Vol.6 No.1
We have studied the auto-lensometer for several years in order to begin korean-made production of it and then developed the auto-lensmeter using with the personal computer. We introduce the most important principal of PSD device and the optical principal of measuring the power of the refraction of the lens by auto-lensometer and also explain the fabrication of the LED optical source system and PSD optical system. Finally, we found the power constant of our auto-lensmeter to be about 30 Diopter/㎜.
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박문찬(Moon Chan Park),진가헌(Ko Hsein Chen),최혜정(Hae Jung Choi),차정원(Jung Won Cha) 한국안광학회 1998 한국안광학회지 Vol.3 No.1
Until now, the study of eye refractive error examination for high school students are a few report that in Korea. In particular, there is few report about the visual power for same group during several years. We compared the study of refractive error done this year with that reported three years ago at the same high school. From the these data, the distribution of ammetropia was investigated. The study of refractive error for high school students was also compared with those reported before for the Adults and the middle school student. When the visual power is refered to spherical equivalent, the 36 % of the whole students examined above had emmetropia and the other part of them fumed out to be ammetropia which is classify to 60.6 % belonged to myopia and 4.4 % belonged to hyperpia. The ratio of myopia for this year students is increased in comparition with the students in 1995. The ratio of emmetropia for this year students is 7.4 % higher, and the ratio of myopia for this year students is 4 % higher, but the ratio of hyperopia is very lower than that for the adults in 1997. In the kind of refractive error, it is classified that a simple myopia is shown to highest ratio as a 28.6 % of 1212 eyes examined, a compound myopic astigmatism to the next high rartio as a 22.4 %, a simple myopic astigmatism as 14.4 %, a simple hyperopic astigmatism as 3.1 %, a mixed astigmatism as a 1.7 %, a simple astigmatism as 1.2%, a compound hyperopic astigmatism as 1.2%, respectively. The percentage of an astigmatism is a 76.7 % of total eyes examined if Cyl-0.25 Dptr is included to an astigmatism. On the other hand, The percentage of an astigmatism is a 45.6 % of total eyes examined if Cyl-0.25 Dptr is excluded to an astigmatism. In the kind of astigmatism, the number of students had an astigmatism with the rule is about 4.5 times than that of astigmatism against the rule. From the result of comparition the right eye with the left eye, the right eye of the students had more a myopic refractive error than the left eye, which is same as adults` case, there is no difference in a refractive error between the boy students and the girl students
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RF magnetron 스파터링법으로 제작한 TiN<SUB>x</SUB> 박막의 XPS 분석
박문찬(Moon Chan Park),오정홍(Jeong Hong Oh),황보창권(Chang Kwan Hwangbo) 한국안광학회 1998 한국안광학회지 Vol.3 No.1
The TiNx thin films were prepared on glass substrate by RF(radio-frequency) magnetron sputtering apparatus from a Ti target in a gaseous mixture of argon and nitrogen. In deposition, a RF power supply was used as a power source with a constant power of 240W, and the substrate was heated to 200℃. The films were obtained at nitrogen flow rates in the range 3-9 seem with a constant argon flow rate of 20 seem. For the films obtained, the chemical binding energy of the films was investigated by XPS (x-ray photoelectron spectroscopy) in order to analyze the chemical nature and composition of the films.
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박문찬(Moon-chan Park),이동훈(Dong-hoon Lee) 한국정보보호학회 2014 정보보호학회논문지 Vol.24 No.5
PKI(Public Key Infrastructure)는 공개키 암호시스템을 안전하게 사용하고 관리하기 위한 보안 표준방식이다. 인터넷상의 전자 금융거래와 같이 안전하지 않은 채널 상에서 사용자의 전자 서명, 인증, 암호화 등과 같은 보안 기능이 요구되는 환경에서 PKI를 채택하고 있다. 현재 PKI에서 소프트 토큰 기반의 개인키는 표준화된 저장소에 파일 형태로 저장되어 있기 때문에 유출되기 쉬우며, 패스워드 기반 암호화 방식으로 보호되어 있으므로 전수조사 공격에 취약하다. 본 논문에서는 소프트 토큰 기반의 개인키 파일이 유출되더라도 패스워드 전수조사 공격에 확률적으로 안전한 서명용 개인키 노출 탐지기법을 제안한다. 제안 기법은 하나의 올바른 공개키/개인키 쌍과 n-1개의 위장(fake) 공개키/개인키 쌍을 사용함으로써 공격자가 패스워드 전수조사 공격에 성공하더라도 올바른 서명 값 생성 또는 인증 성공 확률을 1/n로 낮춘다. 이는 공격자가 위장 개인키로 인증을 시도할 경우 이를 탐지하여 해당 인증서를 폐지하고 사용자에게 통지해 주는 기능도 포함한다. 마지막으로 기존 PKI 및 SSL/TLS를 확장하여 제안 기법을 사용할 수 있게 함으로써 추가 인프라 구축비용 없이 소프트 토큰 기반 개인키 저장 방식의 보안 강도를 높일 수 있도록 한다. A Public Key Infrastructure (PKI) is security standards to manage and use public key cryptosystem. A PKI is used to provide digital signature, authentication, public key encryption functionality on insecure channel, such as E-banking and E-commerce on Internet. A soft-token private key in PKI is leaked easily because it is stored in a file at standardized location. Also it is vulnerable to a brute-force password attack as is protected by password-based encryption. In this paper, we proposed a new method that detects private key compromise and is probabilistically secure against a brute-force password attack though soft-token private key is leaked. The main idea of the proposed method is to use a genuine signature key pair and (n-1) fake signature key pairs to make an attacker difficult to generate a valid signature with probability 1/n even if the attacker found the correct password. The proposed method provides detection and notification functionality when an attacker make an attempt at authentication, and enhances the security of soft-token private key without the additional cost of construction of infrastructure thereby extending the function of the existing PKI and SSL/TLS.
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