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나노위치제어를 이용한 연 X-선 결상현미경 시스템의 조명광학소자 정렬
김재희(Jea Hee Kim),김규겸(Kyu Gyeom Kim),민종환(Jong Hwan Min),김경우(Kyong Woo Kim),권영만(Young Man Kwon),민진영(Jin Young Min),윤권하(Kwon Ha Yoon) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
This paper presents a method of alignment for condenser mirror of soft x-ray microscopy system based on nano-positioning control. The X-ray source was focused on a sample by a doubled ellipsoidal condenser reflective mirror. X-ray source focusing will increase the photon density in the object plane and is very important to approach high resolution imaging. Required degree of freedom (DOF) of optics aligner in X-ray microscope is dependent on the kind of optics, but generally 5-DOF is needed. We used 5-axis manipulator that consists of three linear motions (X, Y and Z) and two tilting motions (Rx, Ry). A linear translation stage is adopted a kind of DC motor with a linear resolution 50nm and travel range of 5mm. The mechanism was controlled with PID controller augmented with closed feedback loop for precision control. A two axis tilt stage is employed a design resolution of 0.23μrad and tilt range of ±7deg. We have designed 5-axis manipulator for alignment of condenser mirror and developed to control algorithm by inverse kinematics. The performance of the proposed 5-DOF manipulator is evaluated by using a laser interferometer system with two plane mirror reflectors. The experimental results are depicted in this paper.
소형화 연 X-선 투과현미경을 위한 새로운 광학설계와 개발
김경우(Kyong-Woo Kim),권영만(Young-Man Kwon),김규겸(Kyu-Gyeom Kim),김재희,민종환(Jong-Hwan Min),임종혁(Jong-Hyeok Lim),남기용(Ki-Yong Nam),민진영(Jin-Young Min),윤권하(Kwon-Ha Yoon) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
In this paper the conceptual design and development of a compact vertical type soft x-ray microscope is described. This x-ray microscope operates in the water window wavelength region (2.3~4.4㎚), where natural contrast between carbon (protein) and oxygen (water) allows imaging of unstained biological material their natural, hydrated environment. Until now, operational x-ray microscopes are based on synchrotron radiation sources, which limit their accessibility. Many biologists would benefit from having the x-ray microscope as a tool among other tools in their own laboratory. For this purpose we introduced the compact vertical type soft X-ray microscope with 50 ㎚ resolution for biomedical application. The compact vertical type soft x-ray microscope is based on a laser plasma x-ray source, doubled ellipsoidal condenser reflective optics, diffractive zone plate optics and MCP coupled with CCD to record an x-ray image. The source is a liquid-jet target laser plasma source, which is practically debris free and suitable for high average power operation. The flux, brightness and bandwidth of this source has been simulated and optimized for X-ray microscopy for biology application. A doubled ellipsoidal condenser reflective mirror operates as condenser and illuminates the sample. The high resolution imaging is currently performed with a ~12% efficient Au zone plate with an outmost zone width of 36㎚. Detection is performed with a Chevron typed MCP coupled with CCD.