http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Sol - Gel 방법을 이용한 FET 형 전해질 센서의 제작 및 특성
문수영,조병욱,김창수,고광락,손병기 ( S . Y . Moon,B . W . Cho,C . S . Kim,K . N . Koh,B . K . Sohn ) 한국센서학회 1998 센서학회지 Vol.7 No.4
PVC membrane, which has been used for membrane of electrolyte sensors, shortened sensor lifetime due to poor adhesion to sensor surface and exhibited difficulty in standardization and mass-production. To overcome these problems, the membrane solution was prepared with neutral carrier, matrix(TEOS:DEDMS=1:3), solvent(ethanol), and a catalyzer(HCl). The fabricated electrolyte sensors showed typical electrical characteristics of MISFET (metal-insulator-semiconductor field-effect transistor). The K-, Ca- and Na-ISFETs showed sensitivity of 53, 2b and 50 mV/decade in wide concentration range, respectively. The response time was about 90 seconds and the drift was 0.05mV/hour. These results suggest that the sol-gel method and the lift-off technique can be applied to formation of membranes and expected to improve mass-productivity, standardzation of the sensors.