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NH4OH - H2O2 - H2O 혼합액을 이용한 GaAs 의 습식식각 특성 연구 및 이를 이용한 부유된 시각형 단면을 가지는 GaAs 미세구조물의 제작 방법
김종팔(Jong Pal Kim),박상준(Sang Jun Park),백승준(Seung Joon Paik),김세태(Se Tae Kim),구치완(Chi Wan Koo),이승기(Seung Ki Lee),조동일(Dong Il Cho) 한국센서학회 2001 센서학회지 Vol.10 No.5
In this research, we investigate wet-etching properties of GaAs in NH₄OH-H₂O₂-H₂O, and develop the fabrication method of GaAs microstructures with rectangular cross section using (001) GaAs substrate. For obtaining wet-etching properties with respect to crystallographic orientation, the etch rates and cross-section etch profiles of (001) GaAs with 16 different compositions and the undercut rates with 5 different compositions are measured using NH₄OH-H₂O₂-H₂O mixed solutions. From these experimental data, a new GaAs micromachining method in bulk (001) GaAs is proposed, and used to fabricate a released microbridges with a rectangular cross section. The developed GaAs micromachining method can be very useful for low-less, highly-tunable capacitors for RF components and for integration with GaAs optical components.