http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
규소 기판 접합에 있어서 FT - IR 을 이용한 수산화기의 영향에 관한 해석
박세광,권기진 ( Sekwang Park,Kijin Kwon ) 한국센서학회 1994 센서학회지 Vol.3 No.2
Silicon direct bonding technology is very attractive for both silicon-on-insulator devices and sensor fabrication because of its thermal stress free structure and stability. The process of SDB includes hydration of silicon wafer and heat treatment in a wet oxidation furnace. After hydration process, hydroxyl groups of silicon wafer were analyzed by using Fourier transformation-infrared spectroscopy. In case of hydrophilic treatment using a (H₂O₂ : H₂SO₄) solution, hydroxyl groups are observed in a broad band around the 3474 cm^(-1) region. However, hydroxyl groups do not appear in case of diluted HF solution. The bonded wafer was etched by using tetramethylammonium hydroxide etchant. The surface of the self etch-stopped silicon dioxide is completely flat, so that it can be used as sensor applications such as pressure, flow and acceleration, etc..
2층 구조 유기 박막 EL 소자의 전기 - 광학적 특성
김민수,박세광 ( Minsoo Kim,Sekwang Park ) 한국센서학회 1995 센서학회지 Vol.4 No.4
Organic thin film electroluminescent(EL) cells were fabricated. Their output characteristics and luminance versus voltage characteristics were measured with different work function metal electrodes. The EL structure was Indium-Tin-Oxide(ITO)/hole transport layer/emission layer(electron transport layer)/metal electrode. PMMA+TPD(0.5 wt%), MC homopolymer+TPD(0.005 wt%) and (MC/MMA) copolymer+TPD(0.005 wt%) were used as hole transport layer. Ca, Mg, Mg:Ag(10:1) and A1 were used as metal electrode. I-V output showed exponential feature, and the threshold voltage of 5 volts and the luminance of over 700 Cd/㎡ at 10 volts were observed.
권기진,김민수,박세광 ( Kijin Kwon,Minsoo Kim,Sekwang Park ) 한국센서학회 1995 센서학회지 Vol.4 No.4
Sensor system which can detect a flowing cell is designed and fabricated by semiconductor processing and EDM(Electro-chemical Discharge drilling Method). Two methods are used in this paper 1) optical method which measures the trasmitted light through the cell passage between transmitter and receiver, 2) impedance method which measures impedance change between electrodes, when cell flows in the cell passage. Experimental result using tabaco leaves shows that the output value by optical method is 0.2V to 0.7V, and the output by impedance method is 0.2V to 2V, which is bigger, but it includes an avoidable noises.
최재건,김형표,박세광 ( Jaigun Choi,Hyunhpyo kim,Sekwang Park ) 한국센서학회 1995 센서학회지 Vol.4 No.2
constant solid state flow velocity/mass sensor has been fabricated and its characteristics were measured according to flow velocity and fluid temperature. Parameters of the sensor circuit were obtained by simulation using finite difference method. Sensitivity was 10mW/(cm/sec) in the range of flow velocity 0-45cm/sec and response time was within two seconds. For the experiment of fluid temperature variation, the sensor output was compensated at the rate of temperature variation 0.1℃/min, however, with the rate of 0.2℃/min it took two minutes to be compensated. Since it is not quite often to have such a rate of temperature variation of 0.2℃/min or more, the developed sensor output can be used for most applications to detect small amount of flow-rate.