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Etch-pits of GaN Films with different etching methods
LU MIN,CHANG XIN,FANG HUI-ZHI,LI ZI-LAN,REN QIAN,YANG HUA,YANG JHI-ZIAN,ZHANG GUO-YI,ZHANG BEI 한국물리학회 2004 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.45 No.3
The etch stop process of SrBi2Ta2O9 (SBT) over CeO2 in Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) is reported in this paper. The etch stop of ferroelectric thin lm on a silicon surface without damage is important for the self-aligned gate structure process in the fabrication of the single-transistor-type ferroelectric random access memory. A high vertical etching angle is also necessary for high integration. We investigated the etch rate of SBT and of Si and CeO2 which were used as a buer layer to improve the interface between SBT and silicon, with various Ar/Cl2 gas mixtures, ICP powers and RF bias powers in ICP-RIE. The highest etching selectivity of SBT/CeO2 and SBT/Si was 6.8 and 0.3 respectively. The vertical angle of SBT was 82 degrees. SEM images and XPS surface analyses showed good etch stop characteristics of the buer layer without damage to the silicon surface.
Ying Wang,Xiu-Liang Zhu,Mohamad Wasil Peeroo,Zi-Hua Qian,Dan Shi,Shu-Mei Wei,Ri-Sheng Yu 대한영상의학회 2015 Korean Journal of Radiology Vol.16 No.1
To describe the imaging features of pelvic solitary plasmacytoma and to correlate them with the pathologic grade. A retrospective study was performed on the imaging features of 10 patients with a histological diagnosis of pelvic solitary plasmacytoma. The imaging studies were assessed for bone expansion, cortical destruction, signal intensity/density of soft tissue mass and enhancement manifestations, which were then correlated to the pathologic grade. The imaging features of pelvic solitary plasmacytoma revealed 3 different types: multilocular type (n = 5), unilocular type (n = 2) and complete osteolytic destruction type (n = 3) on computed tomography and MRI. Pathologically, the tumors were classified into low, intermediate and high grades. Features such as multilocular change, perilesional osteosclerosis, slight expansion, local bone cortex disruptions and masses inside bone destruction, often suggest a low-grade solitary plasmacytoma; complete osteolytic destruction, huge soft tissue mass, and osseous defects imply a higher pathologic grade. Pelvic solitary plasmacytoma has various imaging manifestations, while a slight expansile osteolytic feature with multilocular change or homogeneous enhancement highly suggests its diagnosis. The distinctive imaging features of pelvic solitary plasmacytoma are well correlated to the pathologic grade.