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Growth of ZnO-Nanorod Grating on the Seed Grating Produced by Femtosecond Laser Pulses
Lee, Geon Joon,Nam, Hyun Jung,Hwangbo, Chang Kwon,Lim, Hyunjin,Cheong, Hyeonsik,Kim, Hee Soo,Yoon, Chong Seung,Min, Sun-Ki,Han, Sung-Hwan,Lee, YoungPak IOP Publishing 2010 Japanese journal of applied physics Vol.49 No.r10
"Fabrication of Two-Dimensional Periodic Structures in an Amorphous
YoungPak Lee,Geon Joon Lee,Chong Seung Yoon,Jin Jang,Jinho Ahn,Kyung-Rae Kim,Moon Ik Jang,Yong-Duck Son 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.49 No.III
Two dimensional (2D) periodic structures were produced in an amorphous silicon (a-Si) film by means of femtosecond-laser interference lithography. In order to fabricate 2D periodic structures in the a-Si film, we used four-beam interference lithography. The four beams were generated by using two crossed gratings, and the four beams were superposed onto the a-Si film by using a focusing lens so that 2D periodic patterns were realized in the sample through four-beam interference lithography. In order to prepare two crossed gratings, titanium dioxide gratings were fabricated by a lift-off technique. The surface relief profiles of the gratings were designed so that the +1st- and .1st- order diffracted light intensities were maximized. When the He-Ne laser beam was incident on the prepared 2D periodic structures, the 2D diffraction pattern was observed. The scanning-electronmicroscopy images of the laser-patterned samples showed that the formation of the 2D periodic structure in the a-Si film was ascribed to the combined effect of spatially selective crystallization and laser ablation, which were induced by a laser-interference pattern.