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Photoluminescence Imaging of Luminous Paint for Surface Temperature Monitoring
Hirotaka Kasai,Yoshihiro Kameyama,Toru Hagiwara,Daisuke Ishikawa,Toru Katsumata,Hiroaki Aizawa,Mitsuo Honda,Masayuki Shibasaki,Koichi Otsubo,Shuji Komuro 제어로봇시스템학회 2008 제어로봇시스템학회 국제학술대회 논문집 Vol.2008 No.10
Temperature monitoring is essentially important for stable control of fabrication processes. In order to develop a convenient 2-dimensional temperature monitoring system using a thermo-paint, photoluminescence (PL) images are observed from the luminous paints at various temperatures. Commercially available and in-house modified luminous paints are evaluated for improving temperature sensitivity and stability of the thermo-paints. Temperature dependences of PL images from various luminous paints are reported for developing temperature monitoring procedure using a thermo-paint.