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Sol-Gel 방법을 이용하여 제작된 Pt이 첨가된 Fe<sub>2</sub>O<sub>3</sub> 나노 입자의 가스 감지 특성
장민형,임유성,최승일,박지인,황남경,이문석,Jang, Min-Hyung,Lim, Yooseong,Choi, Seung-Il,Park, Ji-In,Hwang, Namgyung,Yi, Moonsuk 한국전기전자재료학회 2017 전기전자재료학회논문지 Vol.30 No.5
$Fe_2O_3$ is one of the most important metal oxides for gas sensing applications because of its low cost and high stability. It is well-known that the shape, size, and phase of $Fe_2O_3$ have a significant influence on its sensing properties. Many reports are available in the literature on the use of $Fe_2O_3$-based sensors for detecting gases, such as $NO_2$, $NH_3$, $H_2S$, $H_2$, and CO. In this paper, we investigated the gas-sensing performance of a Pt-doped ${\varepsilon}$-phase $Fe_2O_3$ gas sensor. Pt-doped $Fe_2O_3$ nanoparticles were synthesized by a Sol-Gel method. Platinum, known as a catalytic material, was used for improving gas-sensing performance in this research. The gas-response measurement at $300^{\circ}C$ showed that $Fe_2O_3$ gas sensors doped with 3%Pt are selective for $NO_2$ gas and exhibita maximum response of 21.23%. The gas-sensing properties proved that $Fe_2O_3$ could be used as a gas sensor for nitrogen dioxide.