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Sung, Woon Tahk,Kim, Seong Hyok,Lee, Jang Gyu,Kang, Tae Sam Trans Tech Publications, Ltd. 2006 Key Engineering Materials Vol.306 No.-
<P>In this paper, presented are the design and the fabrication of the novel bulk-micromachined gyroscope with its detection and control circuit. The proposed structure is designed to have good properties such as heavy proof mass, a large movement and high moving velocity of the proof mass at an operating frequency. Despite of an appropriate design of the proof mass and comb electrodes, the high-Q property and the capacitance measurement scheme inevitably bring on nonlinear property and limited bandwidth of the system. Moreover, temperature variation degrades the stability of the performance. In this paper, we adopt a feedback control scheme to achieve a linear output and a less sensitive operation to the temperature variation. Through experiments, it is confirmed that the designed gyroscope and the control circuit achieve performances of wide input range of 1,000 deg/sec and bandwidth of 80 Hz.</P>
Design and performance test of a MEMS vibratory gyroscope with a novel AGC force rebalance control
Sung, Woon-Tahk,Sung, Sangkyung,Lee, Jang Gyu,Kang, Taesam IOP 2007 JOURNAL OF MICROMECHANICS AND MICROENGINEERING - Vol.17 No.10
<P>In this paper, the development and performance test results of a laterally oscillating MEMS gyroscope using a novel force rebalance control strategy are presented. The micromachined structure and electrodes are fabricated using the deep reactive ion etching (DRIE) and anodic wafer bonding process. The high quality factor required for the resonance-based sensor is achieved using a vacuum-sealed device package. A systematic design approach of the force rebalance control is applied via a modified automatic gain control (AGC) method. The rebalance control design takes advantages of a novel AGC loop modification, which allows the approximation of the system's dynamics into a simple linear form. Using the proposed modification of AGC and the rebalance strategy that maintains a biased oscillation, a number of performance improvements including bandwidth extension and widened operating range were observed to be achieved. Finally, the experimental results of the gyroscope's practical application verify the feasibility and performance of the developed sensor.</P>
Development of a Micro Gyroscope Using Epitaxial Polysilicon and Its Performance Test
Sung, Woon Tahk,Lim, Hyung Taek,Kang, Tae Sam,Lee, Jang Gyu,Lee, Young Jae Trans Tech Publications, Ltd. 2004 Key Engineering Materials Vol.261 No.-
<P>This paper presents a design and performance tests of in-plane gimbal-structured Z-axis gyroscope. The device is manufactured by conventional surface micro machining process using 15µm-thickness epitaxially grown polysilicon. The total size of the device is 4.8mm x 4.8mm in area including 1mm x 1mm core gyro structure and pads for wire bonding. It is designed as two-gimbaled structure which separates inner and outer gimbals. This leads two nearly identical modes of gyroscope, i.e. driving and sensing mode, to mechanically decoupled ones, resulting in enhanced performance. Experiments are accomplished through frequency analysis and dynamic tests using a detection circuit, a vacuum chamber and a rate table. Through experiments, it is confirmed that the designed gyroscope has 0.003 deg/sec resolution, 0.00095 deg/sec/ Hz noise equivalent density, 0.57 % FSO nonlinearity error and 0.02 deg/sec bias stability. </P>
Controller Design of a MEMS Gyro-Accelerometer with a Single Proof Mass
Woon-Tahk Sung,Taesam Kang,Jang Gyu Lee 대한전기학회 2008 International Journal of Control, Automation, and Vol.6 No.6
This paper presents a parametric study on the controller design scheme for a gyro-accelerometer to have robust performance under some parameter variations. In particular, an integral and derivative based controller design method is suggested to achieve the desired performances of stability margin, bandwidth, and uniformity of scale for both gyroscopes and accelerometers with uncertainties of quality factor and resonant frequency. The simulation result shows that the control loop based on the suggested method gives satisfactory performance robustness under parameter variations, demonstrating the usefulness of the proposed design scheme.
마이크로 자이로스코프를 위한 PD 제어기 설계 및 성능시험
성운탁(Woon Tahk Sung),송진우(Jin Woo Song),이장규(Jang Gyu Lee),강태삼(Taesam Kang) 한국항공우주학회 2005 韓國航空宇宙學會誌 Vol.33 No.3
본 논문에서는 마이크로 자이로스코프를 위한 폐루프 제어기를 설계하여 그 성능이 개선됨을 보였다. 마이크로 자이로스코프는 높은 Q값을 가지는 시스템으로 그 특성상 공진 영역에서 동작하게 되는데, 개루프로 동작할 경우 선형성, 대역폭 등의 성능에 제약이 있게 된다. 폐루프 제어기는 개루프 동작시의 이러한 제약을 극복하고 성능을 개선할 수 있도록 한다. 본 연구에서는 PD 제어기를 적용하였으며 실험 대상이 된 마이크로 자이로스코프는 서울대에서 설계하고 Bosch foundry에서 제작한 SNU-Bosch MEMS 자이로스코프를 사용하였다. 실험을 통해 폐루프 제어기의 성능을 검증한 결과 대역폭은 35㎐에서 78㎐로, 선형성은 2.07%에서 0.504%로, 바이어스 안정도는 0.066deg/sec에서 0.043deg/sec로 개선되는 것을 확인할 수 있었다. This paper presents a performance improvement result with the aid of closed feedback controller loop to a micro gyroscope. The dynamic model of a micro gyroscope is derived and a conventional proportional and derivative controller is designed via frequency domain analysis. The proposed control loop is implemented using several analog devices and applied to the SNU-Bosch MEMS gyroscope to check its performance improvement in real environment. The experiments demonstrated the performance improvement with the proposed feedback control loop. The bandwidth, linearity, and bias stability are improved to 78 ㎐, 0.504 %, and 0.043 deg/sec, respectively, from 35 ㎐, 2.07 %, and 0.066 deg/sec of open loop system.
On the Mode-Matched Control of MEMS Vibratory Gyroscope via Phase-Domain Analysis and Design
Sangkyung Sung,Woon-Tahk Sung,Changjoo Kim,Sukchang Yun,Young Jae Lee IEEE 2009 IEEE/ASME transactions on mechatronics Vol.14 No.4
<P>This paper investigates a novel method for the mode-matched control of a microelectromechanical systems (MEMS) vibratory gyroscope through a phase-domain analysis. Compared with the previous works, the proposed method presents a simple and robust automatic mode tuning scheme for sensitivity enhancement. In designing the mode-matched control loop, the resonant characteristics of the driving axis are used as the reference mode. Then, the phase difference between sense and drive modes at the resonant frequency of drive mode is used to generate a control signal for phase error regulation. For the control loop design, a linear phase-locked loop is adapted. Through the simulation using practical MEMS gyroscope parameters, the mode-matching performance and robustness of the designed control loop is demonstrated. It is also shown that coupling effect yields no degradation of output sensitivity. Finally, the experimental results obtained by implementing the electronics of mode-matched control verify the feasibility of the proposed method.</P>