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Nanoelectromechanical Resonator Design and Performance Analysis
T. J. Kouh,D. H. Kim,K. L. Ekinci 한국생산제조학회 2004 한국공작기계학회 춘계학술대회논문집 Vol.2004 No.-
We describe a method for the detection of nanometer scale displacements of nanoelectromechanical resonators. We also present an analysis of the mechanical motion of these devices. We evaluate the effectiveness of the detection technique by detecting displacements from a series of nanomechanical doubly clamped beam resonators with decreasing dimensions.
Nanoelectromechanical Resonator Design and Performance Analysis
Kouh, T. J.,Kim, D. H.,Ekinci, K. L. 한국공작기계학회 2004 한국공작기계학회 춘계학술대회논문집 Vol.2004 No.-
We describe a method for the detection of nanometer scale displacements of nanoelectromechanical resonators. We also present an analysis of the mechanical motion of these devices. We evaluate the effectiveness of the detection technique by detecting displacements from a series of nanomechanical doubly clamped beam resonators with decreasing dimensions.
Lee, E.J.,Park, Y.,Kim, C.S.,Kouh, T. Elsevier 2010 Current Applied Physics Vol.10 No.3
Here we describe the effect of the incident optical spot size upon the quadrant photodetector on the displacement detection sensitivity of the optical beam deflection method. By varying the size of the beam spot reaching the photodetector and measuring the optical responsivity, we have determined the optical detection sensitivity as a function of the optical spot size on the photodetector. Also, we have calculated the numerical value of the detection sensitivity with the Gaussian optical spot profile and compared with the experimental data. Both experimental and analytic studies show that the optical displacement detection sensitivity increases with the decrease in the width of the Gaussian optical spot. The study presented here will be beneficial in developing the nanomechanical displacement detection techniques based on the beam deflection method with a position-sensitive detector.