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- 저자 : Sachin K. Verma (검색결과 1 건)
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Sachin K. Verma,Shailendra Singh,Girish Wadhwa,Balwinder Raj 한국전기전자재료학회 2020 Transactions on Electrical and Electronic Material Vol.21 No.5
In this Paper, Dielectric Modulated Dopingless Double Gate Transistor (DM-DLDGTFET) device is proposed for the free label detection of the charged and neutral biomolecules. A charge-plasma principle is used for label-free detection of biosensors to reduce the processing complexity and cost of nanoscale products. Firstly, the simulations for the proposed device are carried using Atlas and diff erent electrical parameters are analyzed using the same. It is observed that the dielectric constant and diff erent biomolecule charges for example, protein, DNA, enzyme, cell and many more molecules aff ects the electrical characteristic of the device. The deposition of diff erent workfunction materials over silicon body will do the formation of p+ source and n+ drain region in the DM-DLDGTFET. In addition, by etching the segment of the gate oxide layer to the source end for sensing biomolecules, a nano gap cavity is embedded within the dielectric gate. When biomolecule get immobilized at cavity region, the electrostatic properties of device for example, drain current, I on /I off , subthreshold slope, average subthreshold slope, sensitivity get infl uenced. The energy band diagram and the device’s surface potential for both neutral and charged biomolecules are also discussed. For the validation of the proposed DL-TFET structure, the simulation results are calibrated with reported results and signifi cant improvement are observed in the proposed structure.
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