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Effect of Metallic Interfacial Layers on the Properties of Diamond-Like Carbon Thin Films
Neeraj Dwivedi,Sushil Kumar,Sreekumar C,Saurabh Dayal,C. M. S. Rauthan,O.S. Panwar 대한금속·재료학회 2012 METALS AND MATERIALS International Vol.18 No.2
Diamond like carbon (DLC) thin films with metallic interfacial layers of aluminum and nickel-chromium (Al and Ni-Cr) were grown using a low cost hybrid technique involving a resistive heating thermal evapo-rator and radio frequency plasma enhanced chemical vapor deposition techniques. Stress, hardness, elastic modulus, bonding, phase, and electrical conductivity of these films were investigated. Introduction of interfacial Al and Ni-Cr layers in DLC led to drastic improvement of its conductivity along with a signifi-cant reduction in residual stress but with some reduction of hardness and the elastic modulus. The struc-tural and surface properties of thin films were studied using X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy techniques.
Nanoindentation testing on copper/diamond-like carbon bi-layer films
Neeraj Dwivedi,Sushil Kumar 한국물리학회 2012 Current Applied Physics Vol.12 No.1
In the present work, the effect of indentation load on nano-mechanical properties of copper/diamondlike carbon (Cu/DLC) bi-layer films was explored. In addition, effect of Cu interlayer and influence of self bias on residual stress and various other nano-mechanical properties such as hardness (H) and elastic modulus (E) of Cu/DLC bi-layer films were also discussed. These Cu/DLC bi-layer films were deposited,using hybrid system involving radio frequency (RF)-plasma enhanced chemical vapor deposition and RFsputtering units, under varied self biases from -125 to -225 V. The effect of penetration depth with varied load from 5 to 20 mN on H and E of these Cu/DLC bi-layer films was also analyzed.
Structural and Nano-Mechanical Properties of Nanostructured Diamond-Like Carbon Thin Films
Saurabh Dayal,Sushil Kumar,Neeraj Dwivedi,Sreekumar Chockalingam,C. M. S. Rauthan,O.S. Panwar 대한금속·재료학회 2013 METALS AND MATERIALS International Vol.19 No.3
The effect of self bias on structural and nano-mechanical properties of nanostructured diamond-like carbon (ns-DLC) thin films is explored. These films are grown at different negative self biases ranging from −100 V to −200 V using radio frequency (13.56 MHz) plasma enhanced chemical vapor deposition technique. The generation of nanostructured morphology at room temperature in these films is confirmed by scanning electron microscopy, whereas change in microstructure produced by varying the self biases is confirmed by Raman analysis. These ns-DLC films exhibit very high hardness, which varied from 16 GPa to 31 GPa. With the help of load versus displacement curves, various other important nano-mechanical parameters such as elastic modulus, elastic recovery etc are also estimated. The nano-mechanical properties are further correlated with the Raman and SEM analyses. Owing to their versatile nano-mechanical properties, these ns-DLC films may find application as hard and protective coatings.