http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
A Dual-mode Pico-positioning System using Active Aerostatic Coupling
Mizumoto, Hiroshi,Yabuta, Yoshito,Arii, Shiro,Yabuya, Makoto,Tazoe, Yoichi Korean Society for Precision Engineering 2007 International Journal of Precision Engineering and Vol.8 No.2
This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.
Vibration Control of a High-Speed Air-Bearing Spindle using an Active Aerodynamic Bearing
Hiroshi Mizumoto,ShiroArii,Yoshito Yabuta,Yoichi Tazoe 제어로봇시스템학회 2010 제어로봇시스템학회 국제학술대회 논문집 Vol.2010 No.10
A novel high speed air-bearing spindle is proposed as a tool spindle for small diameter of cutting and grinding tools. The spindle vibration at high rotational speed is suppressed by an active aerodynamic bearing incorporated into the spindle. For generating aerodynamic damping force, the wedge angle on the aerodynamic bearing surface is controlled by piezoelectric actuators. By using several control tactics, the effect of the active control of the aerodynamic bearing on the spindle vibration is analyzed. Experimental result shows that the amplitude of the spindle vibration can be suppressed to be 0.1μm at the rotational speed of 50,000min<SUP>-1</SUP> (833Hz). Final goal of the study is to suppress the amplitude of spindle vibration less than 0.1μm at the rotational speed of 120,000min<SUP>-1</SUP> (2kHz).
Hiroshi Mizumoto,Masao Imai,Yoshito Yabuta,Shiroh Arii 제어로봇시스템학회 2008 제어로봇시스템학회 국제학술대회 논문집 Vol.2008 No.10
A new type of touch probe for measuring small optical parts is proposed. The probe is excited by a piezoelectric actuator in sinusoidal waveform. When the vibrating probe touches an object, harmonic components of the vibration appear in the power spectrum of the probe vibration. When the power of the second harmonic exceeds a threshold level, it is judged that the probe touches the object. Measuring force is small enough for measuring the surface of optical parts. The touch probe is mounted on a small CMM controlled by a PC and evaluated its performance by measuring a standard steel ball.
A Dual-mode Pico-positioning System using Active Aerostatic Coupling
Hiroshi Mizumoto,Yoshito Yabuta,Shiro Arii,Makoto Yabuya,Yoichi Tazoe 한국정밀공학회 2007 International Journal of Precision Engineering and Vol.8 No.2
This paper proposes a dual-mode ultraprecision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twistroller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.