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온도센서를 사용하지 않는 MEMS 마이크로히터 온도제어시스템
Bae, Byung-Hoon,Yeon, Jung-Hoon,Flachsbart Bruce R.,Shannon Mark A. 대한전기학회 2006 전기학회논문지C Vol.55 No.11
In this paper, we present a temperature-controlled system for MEMS electrical resistance heaters without a temperature sensor. To rapidly control the heater temperature, the microheater system developed consists of a power supply, power amplifier, digital ${\underline{P}}roportional-{\underline{I}}ntegral-{\underline{D}}ifferential$ (PID) controller, and a quarter bridge circuit with the microheater and three resistors are nominally balanced. The microheaters are calibrated inside a convection oven to obtain the temperature coefficient with a linear or quadratic fit. A voltage amplifier applies the supply voltage proportional to the control signal from the PID controller. Small changes in heater resistance generate a finite voltage across the quarter bridge circuit, which is fed back to the PID controller to compare with the set-point and to generate the control signal. Two MEMS microheaters are used for evaluating the developed control system - a NiCr serpentine microheater for a preconcentrator and a Nickel microheater for ${\underline{P}}olymerase\;{\underline{C}}hain\;{\underline{R}}eaction$ (PCR) chip.
온도센서를 사용하지 않는 MEMS 마이크로히터 온도제어시스템
裵炳勳(Byunghoon Bae),廉楨勳(Junghoon Yeom),Bruce R. Flachsbart,Mark A. Shannon 대한전기학회 2006 전기학회논문지C Vol.55 No.11
In this paper, we present a temperature-controlled system for MEMS electrical resistance heaters without a temperature sensor. To rapidly control the heater temperature, the microheater system developed consists of a power supply, power amplifier, digital Proportional-Integral-Differential (PID) controller, and a quarter bridge circuit with the microheater and three resistors are nominally balanced. The microheaters are calibrated inside a convection oven to obtain the temperature coefficient with a linear or quadratic fit. A voltage amplifier applies the supply voltage proportional to the control signal from the PID controller. Small changes in heater resistance generate a finite voltage across the quarter bridge circuit, which is fed back to the PID controller to compare with the set-point and to generate the control signal. Two MEMS microheaters are used for evaluating the developed control system - a NiCr serpentine microheater for a preconcentrator and a Nickel microheater for Polymerase Chain Reaction (PCR) chip.
Electrostatically Driven Single Chamber Bidrectional Peristaltic Gas Micropump with Four Electrodes
김봉환,이기성,Mark A. Shannon 한국물리학회 2010 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.57 No.6
An electrostatically driven valveless peristaltic micropump has been developed for pumping gases through microsystems, such as a micro-gas chromatography system. The pump was operated from 85 V up to 115 V, and a maximum flow rate of 40.3 µl/min was measured at 14 Hz and 95 V with an estimated power consumption of 0.87 mW /sccm. The peristaltic micropump has one long chamber and four electrodes that divide one chamber into four small chambers during operation.