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Structural and Optical Properties of RF Magnetron Reactively Sputtered Ag2O Film
Xiao-Yong Gao,Jiao-Min Ma,Chao Chen,Meng-Ke Zhao,Jin-Hua Gu,Jing-Xiao Lu 한국물리학회 2012 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.60 No.5
A series of <111> oriented Ag2O films was deposited onto glass substrates by using RF magnetron reactive sputtering at different flow ratios (FRs) of oxygen to argon. The Ag2O film deposited at FR = 0.667 was the best <111> oriented film due to dual contributions from both lattice strain and film stress. The films’ transmissivity of over 70% in the near-infrared region indicated that Ag2O films are not suitable for applications as transparent conductive films in the visible region. Ag2O films deposited at FRs from 0.467 to 0.800 had optical band gaps ranging from 3.266 eV to 3.107 eV. The redshift in the films’ absorption edge may be attributed to the decrease in the lattice strain with increasing in FR. A series of <111> oriented Ag2O films was deposited onto glass substrates by using RF magnetron reactive sputtering at different flow ratios (FRs) of oxygen to argon. The Ag2O film deposited at FR = 0.667 was the best <111> oriented film due to dual contributions from both lattice strain and film stress. The films’ transmissivity of over 70% in the near-infrared region indicated that Ag2O films are not suitable for applications as transparent conductive films in the visible region. Ag2O films deposited at FRs from 0.467 to 0.800 had optical band gaps ranging from 3.266 eV to 3.107 eV. The redshift in the films’ absorption edge may be attributed to the decrease in the lattice strain with increasing in FR.
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Qiong Huang,Zhi-Yuan Zhang,Wen-Jiao Ma,Ying-Wen Chen,She-Min Zhu,Shu-Bao Shen 한국공업화학회 2012 Journal of Industrial and Engineering Chemistry Vol.18 No.2
The catalytic combustion of toluene over Ni–Mn mixed complex supported on industrial cordierite was investigated. The catalysts were prepared by the wet impregnation method and characterized by using the Brunauer Emmett Teller (BET), Scanning Electron Microscopy (SEM), X-ray diffraction (XRD),Transmission Electron Microscope (TEM) and X-ray fluorescence (XRF). The catalytic activity toward the complete oxidation of toluene to CO2 and H2O strongly depended on the molar ratio of Ni/Mn, loading amount of Ni–Mn oxides, and calcination temperature. All the results above indicated that the Ni–Mn complex oxide catalyst calcined at 400 8C with 0.5 mol ratio of Ni/Mn, 10 wt.% loading amounts, and showed the highest activity as complete oxidation of toluene.
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Xiao-Yong Gao,Hong-Liang Feng,Zeng-Yuan Zhang,Jiao-Min Ma,Meng-Ke Zhao,Chao Chen,Jin-Hua Gu,Shi-E Yang,Yong-Sheng Chen,Jing-Xiao Lu 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.58 No.2
Using values of the oxygen flux ratio (OFR = [O2]/[Ar]) ranging from 0 to 0.5, authors deposited a series of silver-oxide (Ag_xO) films on glass substrates by direct-current reactive magnetron sputtering (DC sputtering) at a substrate temperature of 150 ℃. The effect of the OFR on the film’s structural and optical properties was systematically investigated by using X-ray diffractometry, scanning electron microscopy and spectrophotometry. The Ag_xO films deposited clearly show an evolution of the film’s phase structure from the biphased (Ag + Ag_2O) structure to the biphased (AgO + Ag_2O) structure and then to the single-phased (Ag_2O) structure as value of the OFR increases. Accordingly, the film’s surface morphology, related to the film’s crystalline structure, clearly changes from a loose and porous surface structure to a compact surface structure and then to a pyramid-like surface structure with increasing value of the OFR. The novel porous structure may be attributed to the interruption of the silver’s growth course by the AgO on the film’s surface. Notably, a single-phased Ag_2O film is deposited by DC-sputtering at OFR = 0.5 due to the dual effects of thermal decomposition of the AgO phase and a combination reaction of AgO and Ag to Ag_2O. The oscillations both in the film’s reflectivity and transmissivity spectra are strengthened with increasing OFR, indicating an evolution from the metallic behavior of the biphased (Ag + Ag_2O) film to the dielectric behavior of the biphased (Ag_2O + AgO) film and the single-phased Ag2O film. The fitted optical absorption edges of the Ag_2O and the Ag_xO films deposited at values of the OFR of 0.5 and 0.33 are approximately 2.43 eV and 2.34 eV, respectively. The absorption edges are closely related to the direct interband transitions.
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Gao Xiao-Yong,Feng Hong-Liang,Zhang Zeng-Yuan,Ma Jiao-Min 한국물리학회 2010 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.56 No.4
Silver-oxide (AgxO) films were deposited on glass substrates by direct-current reactive magnetron sputtering at different oxygen flux ratios (OFR = [O2]/[Ar]) and substrate temperatures (Ts). An X-ray diffraction analysis indicates that the AgxO films are biphased (Ag + Ag2O) when deposited at low OFR values and that Ag2O-dominated AgxO film can only be synthesized at higher OFR values, as con¯rmed by X-ray photoelectron spectroscopy. This result may be due to the Ag2O phase being preferably produced at high OFR value. The AgO phase is thermodynamically unsta-ble compared with the Ag2O phase. In order to further offer deep insight into the ¯lm's thermal stability, Ag2O-dominated AgxO ¯lms were thermally treated by using a rapid thermal processing technique at different annealing temperatures for different annealing times. The Ag2O phase is thermodynamically stable at temperatures below the threshold of the thermal decomposition tem-perature which approaches 175 ±C. The domination of the Ag2O phase in the AgxO film may be attributed to the chain reaction AgO → Ag2O ↔ Ag + O, AgO + Ag → Ag2O.
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