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MEMS 용량형 각속도 센서용 CMOS 프로그래머블 인터페이스 회로
고형호(Hyoungho Ko) 大韓電子工學會 2011 電子工學會論文誌-SD (Semiconductor and devices) Vol.48 No.9
본 논문에서는 MEMS 용량형 각속도 센서용 프로그래머블 CMOS 인터페이스 회로를 제작하고, 이를 MEMS 센싱 엘리먼트와 결합하여 평가하였다. 본 회로는 10 bit 프로그래머블 캐패시터 어레이 를 이용한 전하 증폭기, 오프셋 미세 조정을 위한 9 비트 DAC, 출력 민감도의 미세 조정을 위한 10 비트 PGA를 내장하여, 오프셋 및 민감도 오차를 정밀 조정할 수 있다. 제작 결과 자동 이득 제어 회로를 포함한 자가 발진 루프의 정상 동작을 확인하였다. 오프셋 오차와 민감도 오차는 각각 0.36%FSO 와 0.19%FSO 로 측정되었으며, 잡음 등가 해상도와 바이어스 불안정도는 각각 0.016 deg/sec 와 0.012 deg/sec 으로 평가되었다. 본 회로의 조정 기능을 이용하여 MEMS 용량형 각속도 센서의 기생 용량으로 인하여 발생되는 출력 오프셋 및 출력 민감도의 산포를 감소시킬 수 있으며, 이는 센서의 양산성 및 수율 향상에 크게 기여할 수 있을 것으로 기대된다. In this paper, the CMOS programmable interface circuit for MEMS gyroscope is presented, and evaluated with the MEMS sensing element. The circuit includes the front-end charge amplifier with 10 bit programmable capacitor arrays, 9 bit DAC for accurate offset calibration, and 10 bit PGA for accurate gain calibration. The self oscillation loop with automatic gain control operates properly. The offset error and gain error after calibration are measured to be 0.36 %FSO and 0.19 %FSO, respectively. The noise equivalent resolution and bias instability are measured to be 0.016 deg/sec and 0.012 deg/sec, respectively. The calibration capability of this circuit can reduce the variations of the output offset and gain, and this can enhance the manufacturability and can improve the yield.
Lee, Byeoncheol,Ko, Youngwoon,Kim, Hyungseup,Mun, Yeongjin,Huh, Seounghoon,Song, Dongkyu,Roh, Youngtaek,Ko, Hyoungho MYU K.K. 2018 Sensors and materials Vol.30 No.8
<P>This paper presents a first-order delta-sigma (Delta Sigma) capacitance-to-digital converter (CDC) with low noise characteristics and a reconfigurable resolution of 12 to 16 bits. The proposed Delta Sigma CDC is implemented as a first-order Delta Sigma modulator with switched capacitor (SC) integrator and comparator. The resolution can be reconfigured by the accumulator using the reconfigurable 12-to 16-bit up-counter Delta Sigma schemes are widely used for low-noise applications owing to the ability of the Delta Sigma modulator to reduce in-band white noise through its inherent noise-shaping characteristic. Low-frequency colored noises such as flicker (1/f) noises still remain. In order to reduce the low-frequency colored noise component, a chopper stabilization technique is exploited using the SC integrator of the Delta Sigma CDC. The proposed Delta Sigma CDC also controls the offset calibration capacitors that adjust the DC offset. This is caused by a capacitor mismatch owing to process variation and the parasitic capacitance of the input capacitive sensor. The Delta Sigma CDC is fabricated by using the standard 0.18 mu m 1P6M complementary metal-oxide-semiconductor (CMOS) process with an active area of 0.66 mm(2). The total current consumption for the 16-bit Delta Sigma CDC is 141 mu A with a 1.8 V supply.</P>
A 1.2 V Low-Power CMOS Chopper-Stabilized Analog Front-End IC for Glucose Monitoring
Kim, Jongpal,Ko, Hyoungho IEEE 2016 IEEE Sensors Journal Vol. No.
<P>A low-power 1.2 V CMOS chopper-stabilized analog front-end integrated circuit (IC) for glucose monitoring is presented in this letter. The operating parameters of the IC, including reference voltage in potentiostat, current offset, output gain, and offset, are fully programmable. The IC is fabricated using 0.13-mu m CMOS technology, has an active area of 1.4 mm x 4.3 mm, and its power consumption is 30.2 mu W. Furthermore, a chopper-stabilized open-loop transimpedance amplifier is proposed for low-power and low-noise implementation. The integrated input-referred current noise is 260 pArms with a bandwidth of 100 Hz.</P>
MEMS vibratory gyroscope with highly programmable capacitive interface circuit
Jindeok Seo,Kyomook Lim,Hyoungho Ko 제어로봇시스템학회 2012 제어로봇시스템학회 국제학술대회 논문집 Vol.2012 No.10
A programmable continuous-time capacitive ASIC for MEMS (Microelectromechanical System) vibratory gyroscope is presented. The programmable readout circuit minimizes process variations including parasitic capacitances and fabrication imperfections. The fabricated ASIC adopts continuous-time chopper-stabilized architecture to achieve low noise characteristics. To cancel the parasitic effects and to improve the temperature response, a continuous-time front-end architecture with digital trimming is proposed. The fabricated capacitive ASIC is evaluated with gyroscope sensing element. The input range and scale factor are ±90 deg/sec and 164 counts/ deg/sec, respectively.