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      • Trace Metals Optimization in Ceria Abrasive for Material Removal Rate Enhancement during ILD CMP

        Shin, Cheolmin,Choi, Jinhak,Kim, Hojoong,Kulkarni, Atul,Kwak, Donggeon,Kim, Eungchul,Kim, Taesung The Electrochemical Society 2017 ECS journal of solid state science and technology Vol.6 No.10

        <P>Ceria abrasive has been widely used in chemical mechanical planarization (CMP) to achieve a high material removal rate. To achieve optimum CMP performance, Ce<SUP>3+</SUP> ions need to be generated on the ceria particle surface so they can react with SiO<SUB>2</SUB>. Based on the redox reaction, trace metals can be good candidates for forming the required ions. In this study, FeCl<SUB>2</SUB> and CrCl<SUB>2</SUB> trace metals with ceria were evaluated in terms of their CMP performance and effectiveness. The role of oxygen vacancies formed on the ceria surface using trace metals was experimentally investigated. Compared to FeCl<SUB>2</SUB>, CrCl<SUB>2</SUB> exhibits better CMP performance. We observed that with the addition of CrCl<SUB>2</SUB> trace metals in the ceria abrasive, the removal rate of SiO<SUB>2</SUB> was enhanced by 1.3 times that of only ceria abrasive. Further, in the presence of CrCl<SUB>2</SUB>, the SiO<SUB>2</SUB> wafer surface roughness was reduced from 0.473 nm to 0.390 nm.</P>

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        메카넘 휠을 이용한 배관 로봇의 개발에 관한 연구

        김대영(Daeyoung Kim),박순욱(Soonwook Park),이호중(Hojoong Lee),김종필(Jongpil Kim),정원지(Wonji Chung),곽도훈(Dohoon Kwak) 한국기계가공학회 2021 한국기계가공학회지 Vol.20 No.2

        Most pipe-inspection robots have fixed sizes and use a wired cable system. Pipelines are generally composed of various structures, including bent pipes, vertical pipes, branch pipes, and holes, and it is difficult to explore the insides of such modular piping structures. In an offshore plant pipeline, a robot that can pass through the pipe hole in the downward direction or avoid obstacles, such as a measuring instruments, has not been introduced yet. In this study, an inspection robot that can travel through most pipelines in offshore plants is proposed. This robot uses mecanum wheels; upward, downward, and rotary motion; and a novel rotatable mechanism. Moreover, the robot is designed to be compact and lightweight to include additional devices in the middle.

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        Chemical inhibitors destabilize HuR binding to the AU-rich element of TNF-α mRNA

        Min-Ju Chae,Hye Youn Sung,Eun-Hye Kim,Mira Lee,Hojoong Kwak,Chong Hak Chae,Sunwoo Kim,Woong-Yang Park 생화학분자생물학회 2009 Experimental and molecular medicine Vol.41 No.11

        Hu protein R (HuR) binds to the AU-rich element (ARE) in the 3'UTR to stabilize TNF-α mRNA. Here, we identified chemical inhibitors of the interaction between HuR and the ARE of TNF-α mRNA using RNA electrophoretic mobility gel shift assay (EMSA) and filter binding assay. Of 179 chemicals screened, we identified three with a half-maximal inhibitory concentration (IC50) below 10 μM. The IC50 of quercetin, b-40, and b-41 were 1.4, 0.38, and 6.21 μM, respectively, for binding of HuR protein to TNF-α mRNA. Quercetin and b-40 did not inhibit binding of tristetraprolin to the ARE of TNF-α mRNA. When LPS-treated RAW264.7 cells were treated with quercetin and b-40, we observed decreased stability of TNF-α mRNA and decreased levels of secreted TNF-α. From these results, we could find inhibitors for the TNF-α mRNA stability, which might be used advantageously for both the study for post-transcriptional regulation and the discovery of new anti-inflammation drugs. Hu protein R (HuR) binds to the AU-rich element (ARE) in the 3'UTR to stabilize TNF-α mRNA. Here, we identified chemical inhibitors of the interaction between HuR and the ARE of TNF-α mRNA using RNA electrophoretic mobility gel shift assay (EMSA) and filter binding assay. Of 179 chemicals screened, we identified three with a half-maximal inhibitory concentration (IC50) below 10 μM. The IC50 of quercetin, b-40, and b-41 were 1.4, 0.38, and 6.21 μM, respectively, for binding of HuR protein to TNF-α mRNA. Quercetin and b-40 did not inhibit binding of tristetraprolin to the ARE of TNF-α mRNA. When LPS-treated RAW264.7 cells were treated with quercetin and b-40, we observed decreased stability of TNF-α mRNA and decreased levels of secreted TNF-α. From these results, we could find inhibitors for the TNF-α mRNA stability, which might be used advantageously for both the study for post-transcriptional regulation and the discovery of new anti-inflammation drugs.

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