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- 저자 : HeungJin Choi (검색결과 2 건)
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최대 전압 12 kV, 커패시턴스 50~500 pF 가변 진공커패시터 개발
차영광 ( Youngkwang Cha ),이일회 ( Ilhoi Lee ),전기범 ( Kibeom Jeon ),장지훈 ( Jihoon Jang ),주흥진 ( Heungjin Ju ),최승길 ( Seungkil Choi ) 한국전기전자재료학회 2022 전기전자재료학회논문지 Vol.35 No.3
A variable vacuum capacitor (VVC), which is a variable element, is used to match impedance in plasma that changes with various impedance values, and its use is expanding with the rapid growth of the semiconductor business. Since VVCs have to secure insulation performance and vary capacitance within a compact size, electrode design and manufacturing are very important; thus, various technologies such as part design and manufacturing technology and vacuum brazing technology are required. In this study, based on the model of an advanced foreign company that is widely used for impedance matching in the manufacture of semiconductors and displays, a VVC that can realize the same performance was developed. The electrode part was designed, the consistency was confirmed through analysis, and the precision of capacitance was improved by designing a cup-type electrode to secure the concentricity of the electrode. As a result of the evaluation, all requirements was satisfied. We believe that self-development will be possible if satisfactory responses are received through evaluation by VVC consumers in the future.
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이학기,임용진,민경은,최흥진,Hak-Ki Lee,Yong Jin Lim,Kyung Eun Min,HeungJin Choi 대한화학회 1984 대한화학회지 Vol.28 No.6
We obtained fast dyed polypropylene fiber, which has no functional group to be dyed, by producing a carbene on the dye molecule by the pyrolysis of lithium salt of dye molecule-tosylhydrazone, then the carbene simultaneously inserted into a C-H bond of polypropylene. To investigate the possibility of actual use in the industry, a variety of reactive azo dyes were prepared from aldehyde, acetophenone and benzophenone derivatives by changing reactive site of precursors which greatly affected properties of dyes. Reactive dyes of the benzophenone derivatives were excellent in the reaction with polypropylene, especially, a dye prepared from chloroaminobenzophenone with N,N-dimethyl aniline was found most excellent. 難染性纖維인 폴리프로필렌用 反應性染料를 開發하기 위하여 反應部位로서 카르벤을 染料에 生成케하여 폴리프로필렌의 C-H結合에 揷入反應을 시켜 堅固한 染着物을 얻을 수 있었다. 反應性카르벤染料의 前驅體로서 알데히드係, 메틸케톤係 및 페닐케톤係 反應性染料를 合成하고 카보닐基에 토실히드라진 및 부틸리튬을 各各 作用하여 各種染料의 토실히드라존리튬鹽을 만들어 폴리프로필렌상에서 加熱分解시킴으로써 染料分子에 生成된 카르벤이 폴리프로필렌에 共有結合을 하여 染着하였다. 여기에서 合成한 各種 카르벤染料들은 카르벤이 生成되는 隣接位에 있는 置換基의 種類와 位置에 따라 反應性에 差異點을 나타내었다. 특히 페닐케톤係 反應性染料가 反應性이 優秀하였으며 이들 페닐케톤係 反應性染料의 前驅體中에서도 클로로基를 가지는 클로로아미노벤조페논으로부터 合成한 染料가 他에 비해 反應性이 良好하였다.
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