http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Development of a residual gas analyzer utilizing Time-of-Flight mass spectrometry
Byung Gwun Jin,Yong Ju Lee,Sung Jun Lee,Jeong Hun Kim 한국진공학회 2021 한국진공학회 학술발표회초록집 Vol.2021 No.2
Over decades, residual gas analyzers (RGAs) have been developed extensively from analytical research to industrial fields. As semiconductor industry is growing rapidly, fast detection of residual gases becomes important for improvement of the fabrication process. High performance, such as rapid scanning and fine resolution with high sensitivity, and compactness are required for industrial applications. In this work, a Time-of-Flight (ToF)mass spectrometry for fast analyzation of injected gas in real time with an electron impact ionization device has been developed and will be presented.
GPS 재밍 대응을 위한 2차원 MUSIC과 Root-MUSIC 알고리즘의 성능 비교
진미현(Mi-Hyun Jin),이주현(Ju-Hyun Lee),최헌호(Heon-Ho Choi),이상정(Sang-Jeong Lee),신영철(Young-Cheol Shin),이병환(Byung-Hwan Lee),안우근(Woo-Gwun Ahn),박찬식(Chan-Sik Park) 대한전기학회 2011 전기학회논문지 Vol.60 No.11
GPS is vulnerable to jamming because of extremely low signal power. Many anti-jamming techniques are studied for complement this vulnerability. Anti-jamming techniques using array antenna are most effective technique and these techniques are required the DOA estimates. MUSIC algorithm and Root-MUSIC Algorithm are typical algorithms used in DOA estimation. Two algorithms have different characteristics, so the choice of an algorithm may depends on many factors such as the environment and the system requirements. The analysis and performance comparison of both algorithms is necessary to choose the best method to apply. This paper summarizes the theory of MUSIC and Root-MUSIC algorithms. And this paper extends both algorithm to estimate two-dimensional angles. The software simulator of both algorithms are implemented to evaluate the performance. Root-MUSIC algorithm has the computational advantage on ULA. MUSIC algorithm is applicable to any antenna array. MUSIC shows better estimation performance when number of array element is small while the computational load of MUSIC is much higher than Root-MUSIC.
Cu ECMP 공정에서 전해액이 연마거동에 미치는 영향
권태영,김인권,김태곤,조병권,박진구,Kwon, Tae-Young,Kim, In-Kwon,Kim, Tae-Gon,Cho, Byung-Gwun,Park, Jin-Goo 한국재료학회 2008 한국재료학회지 Vol.18 No.6
The purpose of this study is to characterize various electrolytes on electrochemical mechanical planarization (ECMP). The ECMP system was modified from conventional CMP system to measure the potentiodynamic curve and removal rate of Cu. The potentiodynamic curves were measured in static and dynamic states in investigated electrolytes using a potentiostat for the evaluation of the polishing behavior on ECMP. KOH (alkaline) and $NaNO_3$ (salt) were selected as electrolytes which have high conductivity. In static and dynamic states, the corrosion potential decreased and the corrosion current increased as a function of the electrolyte concentration. But, the electrochemical reaction was prevented by mechanical polishing effect in the dynamic state. The static etch and removal rate were measured as functions of concentration and applied voltage. When $NaNO_3$ was used, the dissolution was much faster than that of KOH. It was concluded that the removal rate was strongly depended on electrochemical dissolution. The removal rate increased up to 350 nm/min in $NaNO_3$ based electrolyte.