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초탄성 링크를 이용한 초정밀 3자유도 병렬형 매니퓰레이터 개발
윤덕원(Deok-won Yun),탁태열(Tae-Yul Tak),김진호(Jin-Ho Kim),서승환(Seung-whan Suh),이동찬(Dong-Chan Lee),한창수(Chang-Soo Han),최현석(Hyeun-Seok Choi),강은구(Eun-goo Kang),홍원표(Won-pyo Hong),최헌종(Hun-jong Choi) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
According to the growth of nano science and technology, ultra high precision stage and manipulator is recently required at a variety of equipment (SEM, FIB, AFM, STM etc.). In this study, 3-DOF parallel manipulator using the merits of parallel robot is developed, and inverse kinematics is studied for the parallel type manipulator. This manipulator using the pantograph type PZT is operated, and joints and links using the super-elastic material arecomposed. FEM analysis is performed in order to considerate reasonability to use super-elastic wire.
한창수(Changsoo Han),윤덕원(Deok won Yun),최현석(Hyeunseok Choi),홍원표(Wonpyo Hong),강은구(Eungoo Kang),최헌종(Hunjong Choi) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Recently PZT is used in ultra precision mechanism field. PZT itself has a small driving range although it has a high resolution. Many methods, such as inchworm, impact driving, inertial sliding method, etc., have been applied for moving range expansion. In this study, a new actuating mechanism for rotational motion with two driving PZT is proposed. The Fixed-Fixed beam support is applied for compensation of the difference in driving force between expansion and contraction of PZT. The behavior and design parameters of the proposed mechanism are analyzed for improving performance.