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정완영,이덕동 경북대학교 센서기술연구소 1990 센서技術學術大會論文集 Vol.1 No.1
Hematite(α-Fe_(2)O_(3)) in fine powder form, as raw material for hydrocarbon gas sensors, were prepared from iron(II) sulfate and stanic chloride by hydrolysis and coprecipitation. And the α-Fe_(2)O_(3)-based thick film gas sensors were made by screen printing technique. The microstructure and composition of raw material were affected by the pH value which has been controlled during the process of the raw material preparation. Also the pH value showed an effect on the sensitivity to gases for the thick film. It was thought that the sulfate ions localized in the thick film play an active role in hydrocarbon gas adsorption phenomena. The thick films of α-Fe_(2)O_(3)/α-Al_(2)O_(3)/Pd (78:20:2 in weight)system had good adhesion to alumina substrate and exhibited relatively high sensitivity to CH_(4) at 350 ℃.
Au 가 이산적으로 분포된 SnO₂_(-x) 박막의 가스감지 특성
심창현,정완영,박효덕,이재현,이덕동 경북대학교 센서기술연구소 1991 센서技術學術大會論文集 Vol.2 No.1
Sn thin film was deposited by thermal evaporation of Sn granulars. SnO_(2-x) thin film was obtained by thermal oxidation of the deposited Sn thin film. Au was deposited on the SnO_(2-x) and was annealed on 350℃ hot plate for 15 hours in air. Au thin film was dispersed as islands in this process. The dispersed gold film on tin oxide enhanced gas sensitivity to CO, C_(4)H_(10). Especially the SnO_(2-x) thin film had excellent selectivity for CO at low operating temperature.