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1 keV $Ar^+$ 이온의 조사가 유리기판위의 금 박막의 미치는 영향
장홍규,김기환,한성,최원국,고석근,정형진,Jang, H. G.,Kim, H. S.,Han, S.,Choi, W. K.,Koh, S. K.,Jung, H. J. 한국진공학회 1996 Applied Science and Convergence Technology Vol.5 No.4
유리기판(BK7)에 5-cm cold-hollow cathode형 이온건(ion gun)을 이용한 sputtering 방법으로 금 박막을 1600$\AA$ 두께 (RBS확인한 두께 : 1590 $\AA$)로 증착하였다. 증착후 15$\mu$A/$\textrm{cm}^2$의 이온전류밀도를 갖는 1 keV $Ar^+$ beam을 이용하여 $1\times 10^{16}\;Ar^+\textrm{cm}^{-2}$에서 $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$의 이온선량을 조사하였다. 박막제작시와 $Ar^+$이온조사시의 진공도는 $1\times 10^{-6}-1\times 10^{-5}$Torr이었으며, 기판온도는 상온으로 하였다. 금 박막은 $Ar^+$이온의 조사에 관계없이 모두 (111)방향만 관찰되었으며, $Ar^+$이온이 조사된 시료의 x-ray peak의 세기는 이온선량이 증가함에 따라 감소하였다. Rutherford Backscattering Spectroscopy(RBS) 측정결과 $Ar^+$ 이온선량이 증가함에 따라 sputtering yield는 감소하였다. $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$의 이온선량이 조사된 시료는 두께가 711$\AA$으로 이온의 조사에 의해 Au 박막이 879$\AA$ sputter된 것을 확인하였으며, 이 때 sputtering yield는 2.57이었다. Atomic Force Microscope(AFM) 측정 결과 이온선량이 증가함에 따라 Au 박막의 Rms표면 거칠기는 16$\AA$에서 118$\AA$으로 증가하였다. 또한 Scratch test를 이용한 박막의 접착력 측정결과 이온선량이 증가함에 따라 유리기판위에 Au박막의 접착력은 1.1N에서 10N으로 9배 이상 증가하였다. 이상의 결과로부터 낮은 에너지의 이온선을 조사하여 유리기판고 금 박막사이에 좋은 접착력을 갖는 박막을 제작할 수 있었다. Au films with a thickness around 1600 $\AA$ were deposited onto glass at room temperature by ion beam sputtering with a 5 cm cold-hollow ion gun at pressure $1\times 10^{-6}-1\times 10^{-5}$ Torr. Irradiation of the Au deposited samples was carried out at pressure of $7\times 10^{-6}$ Torr. For the sputter depositions, $Ar^+$ ion energy was 1 keV, and the current density at the substrate surface was 15 $\mu$A/$\textrm{cm}^2$. Effects of 1 keV $Ar^+$ ion dose($I_d$) between $1\times 10^{16}\; and\;2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$on properties such as crystallinity, surface roughness and adhesion, etc. of the films have been investigated. The Au films sputtered by $Ar^+$ ion beam had only (111) plane and the X-ray intensity of the films decreased with increase of $I_d$. The thickness of Au films reduced with Id. $R_{ms}$ surface roughness of the films increased from 16 $\AA$ at as-deposited to 1118 $\AA$ at ion dose= $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$. Adhesion of Au film on sputtered at $I_d$= $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$ was 9 times greater than that of Au film with untreated, as determined by a scratch test.
장홍규,조영만,김창원 대한상하수도학회 2014 상하수도학회지 Vol.28 No.5
Researcher of this study improved conventional circle secondary settling basin, through the way such as extend of inlet pipe length, introduction of device for inducting uniforming of flow, keeping of height of sludge interface. Also, we compared conventional circle settling basin to improved circle settling basin the water treatment efficiency. Result of research, when SVI is average 117, improvement rate of SS and BOD were 51.0%, 37.0% approximately compared to conventional settling basin. And when SVI is average 178, improvement rate of SS and BOD were 22.7%, 36.0% approximately. Also when SVI is average 196, improvement rate of SS and BOD were 24.7%, 30.3% approximately. When it’s winter, improvement rate of SS, BOD, COD, TN and TP were 20.6%, 17.9%, 13.9%, 13.5%, 12.4% approximately. Therefore, we can be the judge, this improved settling basin can be used as the final settling basin in the waste water treatment plant.
매선요법 단독치료로 호전된 만성 요통 환자 4례 임상증례보고
장홍규,우창훈,안희덕,권헌준,Jang, Hong-Gyu,Woo, Chang-Hun,Ahn, Hui-Duk,Kwon, Hun-Joon 척추신경추나의학회 2014 척추신경추나의학회지 Vol.9 No.2
Objectives : The aim of this study was to evaluate clinical effects of Needle embeeding therapy on Chronic low back pain. Methods : The patients have been treated only with Needle embeeding therapy for once a week for 4 weeks. To estimate the efficacy of Needle embeeding therapy and functional changes of patients we have checked VNRS and ODI every week. Results : The Needle embedding therapy reduced VNRS and ODI score. Conclusion : The result suggests Needle embeeding therapy can be effective treatment on patients with Chronic low back pain.
요추굴곡신연기법과 좌위흉요추교정법을 이용한 청소년기 특발성 척추측만증 환자 치험 2례
장홍규,양두화,우창훈,안희덕,Jang, Hong-Gyu,Yang, Du-Hwa,Woo, Chang-Hun,Ahn, Hui-Duk 척추신경추나의학회 2014 척추신경추나의학회지 Vol.9 No.1
Objectives : The purpose of this study was to report clinical effects of Lumbar flexion-distraction manipulation and Sitting position thoracic and lumbar vertebra adjustment manipulation on patient with Juvenile idiopathic scoliosis Methods : The patients have been treated with the above two Chuna manual manipulations. We measured Cobb's angle, VNRS before and after treatment Results : After treatment, we confirmed these transition : In first case, Cobb's angle of T-spine changed from 27 to 23 : Cobb's angle of L-spine changed from 17 to 10 : VNRS changed from 6 to 2. In second case Cobb's angle of T-spine changed from 30 to 21 : Cobb's angle of L-spine changed from 16 to 16 : VNRS chagned from 6 to 3 Conclusion : The result suggests that these two Chuna manual manipulations were effective treatment on patients with Juvenile idiopathic scoliosis.